公开(公告)号：US20160135588A1

公开(公告)日：2016-05-19

申请号：US14901378

申请日：2013-12-18

Applicant: NSK LTD.

Inventor： Toshinori SATOU

IPC: A47B13/08 ,  F16C29/06 ,  F16C32/06

CPC classification number: A47B13/081 ,  F16C29/004 ,  F16C29/008 ,  F16C29/025 ,  F16C29/06 ,  F16C32/0614 ,  F16C32/0618 ,  G03F7/70716 ,  G03F7/70816

Abstract: A table device including: a first base including a first reference surface; a second base including a second reference surface, and movable on the first reference surface in a direction parallel to a first axis; a first bearing member provided to the second base, and forming a gas bearing between the first bearing member and the first reference surface; a second bearing member provided to the second base, apart from the first bearing member relative to a direction parallel to a second axis perpendicular to the first axis, and forming a gas bearing between the second bearing member and the first reference surface; and a table movable on the second reference surface. A distance between the first bearing member and the second bearing member is longer than a dimension of a moving range of the table relative to the direction parallel to the second axis.

Abstract translation: 一种台装置，包括：第一基座，包括第一参考表面; 第二基座，包括第二参考表面，并且可以在平行于第一轴线的方向上在第一参考表面上移动; 设置在所述第二基座上的第一轴承部件，在所述第一轴承部件与所述第一基准面之间形成气体轴承; 第二轴承构件，其相对于垂直于所述第一轴线的第二轴线平行的方向设置在所述第二基座上，并且在所述第二轴承构件和所述第一参考表面之间形成气体轴承; 以及可在第二参考表面上移动的台。 第一轴承构件和第二轴承构件之间的距离比工作台相对于平行于第二轴线的方向的移动范围的尺寸长。

公开(公告)号：US20160135587A1

公开(公告)日：2016-05-19

申请号：US14901377

申请日：2013-12-18

Applicant: NSK Ltd.

Inventor： Toshinori SATOU

IPC: A47B13/08 ,  F16C29/06 ,  A47B9/10 ,  F16C32/06

CPC classification number: A47B13/081 ,  A47B9/00 ,  A47B9/10 ,  B23Q1/64 ,  F16C29/025 ,  F16C29/06 ,  F16C32/06 ,  F16C32/0614 ,  F16C2322/39 ,  G03F7/70716 ,  G03F7/70816 ,  G12B5/00

Abstract: A table device including a first member; a second member; a first guide device guiding the second member such that the second member is moved in a direction parallel to a first axis by movement of the first member; a table supported by the second member; a third member connected to at least a part of the table; a bearing member forming a gas bearing between the bearing member and the third member with a gas supplied between the bearing member and the third member, and movably supporting the third member in the direction parallel to the first axis; and a support device including a parallel pin that is arranged such that the parallel pin becomes parallel to the first axis, and connects the second member and the table, and supporting the table. The table is supported by the second member through the support device.

Abstract translation: 一种表装置，包括第一构件; 第二名成员 引导所述第二构件的第一引导装置，使得所述第二构件通过所述第一构件的移动在平行于第一轴线的方向上移动; 由第二个成员支持的表; 连接到所述桌子的至少一部分的第三构件; 轴承构件，在轴承构件和第三构件之间形成气体轴承，其中气体供应在轴承构件和第三构件之间，并且在平行于第一轴线的方向上可移动地支撑第三构件; 以及支撑装置，其包括平行销，所述平行销布置成使得所述平行销平行于所述第一轴线，并且连接所述第二构件和所述工作台，并且支撑所述工作台。 该表由第二个成员通过支持设备支持。

公开(公告)号：US20160118855A1

公开(公告)日：2016-04-28

申请号：US14892442

申请日：2014-05-07

Applicant: NSK LTD.

Inventor： Masayuki MARUYAMA ,  Yusuke OTA ,  Kazunori KOIZUMI ,  Hayao WATANABE ,  Toshinori SATOU

IPC: H02K5/10 ,  H02K11/225

CPC classification number: H02K5/10 ,  H02K11/225 ,  H02K2205/09

Abstract: Provided are a motor having a small number of parts and provided with waterproof performance in a low-cost method, and a positioning device and a conveyance device that are positioned and driven by the motor. The motor includes a columnar motor body that is formed with a center hole penetrating in an axial direction, and a housing for accommodating the motor body. The housing includes a cylindrical part that covers an outer peripheral surface of the motor body; a rotation output part provided on an upper side of the cylindrical part in the axial direction and fixed to rotary bodies of the motor body; and a fixed part provided on a lower side of the cylindrical part in the axial direction and fixed to fixed bodies of the motor body. The housing is sealed by a sealing mechanism at only one place of the cylindrical part in the axial direction.

Abstract translation: 本发明提供一种具有少量部件并以低成本方法提供防水性能的电动机，以及由电动机定位和驱动的定位装置和输送装置。 电动机包括形成有沿轴向贯通的中心孔的柱状电动机主体和容纳电动机主体的壳体。 壳体包括覆盖电动机主体的外周面的圆筒部; 旋转输出部，其设置在所述筒状部的轴向上侧上并固定于所述电动机主体的旋转体; 以及固定部，其设置在所述圆筒部的轴向的下侧，并固定到所述电动机主体的固定体。 壳体通过密封机构在轴向方向上仅在圆柱形部分的一个位置处密封。

公开(公告)号：US20160369938A1

公开(公告)日：2016-12-22

申请号：US14902369

申请日：2013-12-18

Applicant: NSK LTD.

Inventor： Toshinori SATOU

IPC: F16M11/18 ,  H01L21/677 ,  F16M11/04

CPC classification number: F16M11/18 ,  F16C29/06 ,  F16C32/06 ,  F16C32/0607 ,  F16C2322/39 ,  F16M11/046 ,  F16M2200/047 ,  G03F7/70716 ,  G03F7/70816 ,  H01L21/67796

Abstract: A table device including: a first member; a second member; a first guide device guiding the second member; a table supported by the second member; a first movable member connected to the table; a second movable member connected to the table; a first bearing member movably supporting the first movable member; a second bearing member movably supporting the second movable member; an actuator; and a gravity compensation device that includes a first supply portion supplying a gas to a first space facing the first movable member, a first adjustment portion adjusting an amount of the gas from the first supply portion, a second supply portion supplying a gas to a second space facing the second movable member, and a second adjustment portion adjusting an amount of the gas from the second supply portion, and can adjust a pressure in each of the first and second spaces.

Abstract translation: 一种桌子装置，包括：第一构件; 第二名成员 引导第二构件的第一引导装置; 由第二个成员支持的表; 连接到桌子的第一可动构件; 连接到所述台的第二可动构件; 可移动地支撑所述第一可动构件的第一支承构件; 可移动地支撑所述第二可动构件的第二轴承构件; 执行机构 以及重力补偿装置，其包括向面向所述第一可动构件的第一空间供给气体的第一供给部，调整来自所述第一供给部的气体量的第一调整部，向第二供给部供给气体的第二供给部 以及第二调节部分，其调节来自第二供应部分的气体的量，并且可以调节第一和第二空间中的每一个中的压力。