公开(公告)号：US09557238B2

公开(公告)日：2017-01-31

申请号：US14340765

申请日：2014-07-25

Applicant: NXP B.V.

Inventor： Willem Besling ,  Martijn Goossens ,  Peter Steeneken ,  Remco Pijnenburg ,  Marten Oldsen ,  Casper van der Avoort

IPC: G01L19/04 ,  G01L9/12 ,  B81C1/00 ,  G01L9/00 ,  B81B7/00

CPC classification number: G01L9/12 ,  B81B7/0038 ,  B81C1/00158 ,  B81C1/00285 ,  G01L9/0073 ,  G01L19/04

Abstract: Various exemplary embodiments relate to a pressure sensor including a pressure sensitive membrane suspended over a cavity, wherein the membrane is secured by a set of anchors to a substrate; and a getter material embedded in the membrane, wherein the surface of the getter is in contact with any gas within the cavity, and wherein two end points of the getter material are attached through the substrate by anchors capable of conducting through the substrate an electrical current through the getter material.

Abstract translation: 各种示例性实施例涉及包括悬浮在空腔上的压敏膜的压力传感器，其中膜通过一组锚固件固定到基底; 以及嵌入膜中的吸气剂材料，其中吸气剂的表面与空腔内的任何气体接触，并且其中吸气剂材料的两个端点通过能够通过衬底导通电流的锚固件附着在衬底上， 通过吸气材料。

公开(公告)号：US09209746B2

公开(公告)日：2015-12-08

申请号：US14090397

申请日：2013-11-26

Applicant: NXP B.V.

Inventor： Kim Phan Le ,  Jozef Thomas Martinus van Beek ,  Martijn Goossens

IPC: H03B5/30 ,  H03B5/42

CPC classification number: H03B5/30 ,  H03B5/42 ,  H03B2200/0016

Abstract: The invention provides MEMS oscillator designs in which the thermal actuation and piezoresistive detection signals are separated.A first approach splits the frequency of the loop into two distinct components, an actuation frequency and a detection frequency. A second approach modifies the design of the MEMS resonator such that the actuation signal follows a different path through the MEMS resonator than the detection signal.

Abstract translation: 本发明提供了MEMS振荡器设计，其中热致动和压阻检测信号被分离。 第一种方法将环路的频率分为两个不同的分量，即致动频率和检测频率。 第二种方法修改了MEMS谐振器的设计，使得致动信号遵循与检测信号相比通过MEMS谐振器的不同路径。

公开(公告)号：US20140159826A1

公开(公告)日：2014-06-12

申请号：US14090397

申请日：2013-11-26

Applicant: NXP B.V.

Inventor： Kim Phan Le ,  Jozef Thomas Martinus van Beek ,  Martijn Goossens

IPC: H03K3/02 ,  H03B5/30

CPC classification number: H03B5/30 ,  H03B5/42 ,  H03B2200/0016

Abstract: The invention provides MEMS oscillator designs in which the thermal actuation and piezoresistive detection signals are separated.A first approach splits the frequency of the loop into two distinct components, an actuation frequency and a detection frequency. A second approach modifies the design of the MEMS resonator such that the actuation signal follows a different path through the MEMS resonator than the detection signal.

Abstract translation: 本发明提供了MEMS振荡器设计，其中热致动和压阻检测信号被分离。 第一种方法将环路的频率分为两个不同的分量，即致动频率和检测频率。 第二种方法修改了MEMS谐振器的设计，使得致动信号遵循与检测信号相比通过MEMS谐振器的不同路径。