公开(公告)号：US20160284979A1

公开(公告)日：2016-09-29

申请号：US15074005

申请日：2016-03-18

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： TAKAFUMI FUKUI ,  KIYOSHI YAMAKOSHI ,  YOSHIKO HIGASHI

IPC: H01L41/277 ,  H01L41/297 ,  H01L41/35 ,  H01L41/047

CPC classification number: H01L41/0815 ,  H01L41/1876 ,  H01L41/314 ,  H01L41/319

Abstract: A piezoelectric device includes a substrate, a lower electrode disposed above the substrate, a lower bonding layer disposed on the lower electrode, a piezoelectric layer containing a piezoelectric material disposed on an upper surface of the lower bonding layer, and an upper electrode disposed above the piezoelectric layer. The lower bonding layer includes an electrode material portion containing an electrode material of the lower electrode and a piezoelectric material portion containing a piezoelectric material. The electrode material portion and the piezoelectric material portion interdigitate with each other in the lower bonding layer.

Abstract translation: 一种压电装置，包括基板，设置在基板上的下电极，设置在下电极上的下接合层，包含设置在下接合层的上表面上的压电材料的压电层和设置在下接合层上方的上电极 压电层。 下接合层包括含有下电极的电极材料的电极材料部分和包含压电材料的压电材料部分。 电极材料部分和压电材料部分在下粘合层中相互交错。