-
1.
公开(公告)号:US20180168034A1
公开(公告)日:2018-06-14
申请号:US15577011
申请日:2016-06-22
Inventor: RYOSUKE MESHII , KAZUO GODA , TAKAHIRO SHINOHARA , TAKANORI AOYAGI , KENSAKU YAMAMOTO , HITOSHI YOSHIDA
IPC: H05K1/02 , H05K1/03 , G01P15/125
CPC classification number: H05K1/0298 , B81B7/007 , B81B7/0074 , B81B2207/092 , B81B2207/096 , G01P1/00 , G01P15/08 , G01P15/125 , H05K1/0306
Abstract: A wiring-buried glass substrate includes a glass substrate and a first wiring. The glass substrate includes a first surface, a second surface perpendicular to the first surface, and a third surface facing the first surface. The first wiring includes a first pillar portion and a first beam portion. The first pillar portion extends in a first direction perpendicular to the first surface of the glass substrate. The first beam portion is connected to a first surface of the first pillar portion and extends to a second direction perpendicular to a second surface of the glass substrate. The first wiring is buried in the glass substrate. The first surface of the first beam portion is exposed from a third surface of the glass substrate.