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公开(公告)号:US11696078B2
公开(公告)日:2023-07-04
申请号:US17879454
申请日:2022-08-02
Applicant: QUALCOMM Technologies, Inc.
Inventor: Craig Core , Hamid Basaeri , Robert Littrell
CPC classification number: H04R19/04 , B81B3/0021 , B81C1/00158 , H04R1/04 , H04R7/06 , H04R19/005 , H04R31/003 , B81B2201/0257 , B81B2203/019 , B81B2203/0127 , B81B2203/0315 , B81B2207/012 , B81C2201/013 , H04R2201/003
Abstract: A robust MEMS transducer includes a kinetic energy diverter disposed within its frontside cavity. The kinetic energy diverter blunts or diverts kinetic energy in a mass of air moving through the frontside cavity, before that kinetic energy reaches a diaphragm of the MEMS transducer. The kinetic energy diverter renders the MEMS transducer more robust and resistant to damage from such a moving mass of air.