Target shields for improved magnetic properties of a recording medium
    1.
    发明授权
    Target shields for improved magnetic properties of a recording medium 有权
    用于提高记录介质的磁性能的目标屏蔽

    公开(公告)号:US06482301B1

    公开(公告)日:2002-11-19

    申请号:US09326245

    申请日:1999-06-04

    IPC分类号: C23C1432

    摘要: A collimator system is disclosed for use in an in-line pass-by sputtering system during the fabrication of recording media to improve the data storage density and read/write performance characteristics of the media. The collimator system includes a collimator shield and a collimator honeycomb. The shield includes a rectangular tube having a flange and a frame at inner and outer ends, respectively. The various components of the shield in part serve to prevent possible contamination of substrates due to target atom accumulation on the chamber walls during the sputtering process. The collimator honeycomb is provided for blocking target atoms from contacting the substrate at low incident angles. The collimator honeycomb is comprised of a plurality of collimators which are identical to each other. In a preferred embodiment, the collimators have a hexagonal cross-section taken from a perspective perpendicular to the substrate. The collimators may also have other geometric shapes. It is also contemplated that more than one collimator honeycomb level be used in alternative embodiments.

    摘要翻译: 在制造记录介质期间公开了一种用于在线传递溅射系统的准直器系统,以改善数据存储密度和读/写性能特性。 准直仪系统包括准直器屏蔽和准直器蜂窝。 护罩包括分别在内端和外端具有凸缘和框架的矩形管。 屏蔽件的各种部件部分地用于防止在溅射过程期间由于靶室原子在室壁上的积聚而引起的基板的可能污染。 提供准直器蜂窝用于阻止目标原子以低入射角接触基板。 准直器蜂窝体由多个彼此相同的准直器构成。 在优选实施例中,准直器具有垂直于衬底的透视图的六边形截面。 准直器也可以具有其他几何形状。 还可以想到,在替代实施例中可以使用多于一个准直器蜂窝等级。

    Magnetic recording media with a surface-oxidized nial sub-seedlayer
    2.
    发明授权
    Magnetic recording media with a surface-oxidized nial sub-seedlayer 失效
    具有表面氧化的Nial子种子层的磁记录介质

    公开(公告)号:US06348276B1

    公开(公告)日:2002-02-19

    申请号:US09382581

    申请日:1999-08-25

    IPC分类号: G11B566

    摘要: Magnetic recording media with high coercivity and low noise, suitable for high density longitudinal recording, are formed with a surface oxidized sub-seedlayer between a non-magnetic substrate and seedlayer. Embodiments include depositing a NiAl sub-seedlayer on a glass or glass-ceramic substrate, oxidizing the surface of the NiAl sub-seedlayer, and then sequentially depositing a NiAl seedlayer, Cr or Cr alloy underlayer, e.g., CrMo, an optional intermediate CoCrTa alloy layer, a magnetic layer, e.g., a Co-alloy magnetic layer, and a protective overcoat, e.g., a carbon-containing protective overcoat.

    摘要翻译: 在非磁性基材和籽晶层之间形成表面氧化亚子层,适用于高密度纵向记录的具有高矫顽力和低噪声的磁记录介质。 实施例包括在玻璃或玻璃陶瓷基片上沉积NiAl亚子层,氧化NiAl亚子层的表面,然后依次沉积NiAl种子层,Cr或Cr合金底层,例如CrMo,任选的中间CoCrTa合金 层,磁性层,例如Co合金磁性层和保护性外涂层,例如含碳保护性外涂层。

    High coercivity, low noise magnetic recording medium comprising an intermediate cocrtaox layer
    3.
    发明授权
    High coercivity, low noise magnetic recording medium comprising an intermediate cocrtaox layer 失效
    高矫顽力,低噪声磁记录介质,包括中间共沉淀层

    公开(公告)号:US06242086B1

    公开(公告)日:2001-06-05

    申请号:US09188682

    申请日:1998-11-10

    IPC分类号: G11B5738

    摘要: High areal density magnetic recording media are formed with a thin CoCrTaOx intermediate layer which provides appropriate crystalline orientation and surface morphology for the nucleation and growth of a magnetic layer thereon having increased coercivity and high squareness, while avoiding high substrate heating temperatures. Embodiments include sputter depositing an intermediate layer comprising Co, about 10 to about 20 atomic % Cr and about 1 to about 6 atomic % Ta, at a thickness of about 1.5 to about 18 Å on a Cr or Cr alloy underlayer, allowing partial oxidation of the surface of the intermediate layer by residual oxygen in the sputtering system, and then sputter depositing a CoCrPtTa magnetic alloy layer thereon.

    摘要翻译: 高密度磁记录介质用薄的CoCrTaOx中间层形成,其提供适当的结晶取向和表面形态,用于其上具有增强矫顽力和高矩形度的磁性层的成核和生长,同时避免高的基板加热温度。 实施方案包括在Cr或Cr合金底层上以约1.5至约18的厚度溅射沉积包含Co,约10至约20原子%Cr和约1至约6原子%Ta的中间层,允许部分氧化 中间层的表面通过溅射系统中的残余氧,然后在其上溅射沉积CoCrPtTa磁性合金层。

    Magnetic recording media comprising a silicon carbide corrosion barrier layer and a c-overcoat
    4.
    发明授权
    Magnetic recording media comprising a silicon carbide corrosion barrier layer and a c-overcoat 失效
    磁记录介质包括碳化硅腐蚀阻挡层和c覆盖层

    公开(公告)号:US06572958B1

    公开(公告)日:2003-06-03

    申请号:US09621530

    申请日:2000-07-21

    IPC分类号: G11B572

    摘要: A magnetic recording medium is provided with a dual layer protective overcoat system comprising a SiC corrosion barrier layer and a carbon-containing protective overcoat thereon. The SiC layer effectively prevents or significantly reduces Co and Ni diffusion to the medium surface. Embodiments include magnetic recording media comprising a SiC corrosion barrier layer over a magnetic layer, an overlying protective layer of amorphous hydrogenated carbon, amorphous nitrogenated carbon or amorphous hydrogen-nitrogenated carbon, and a lubricant topcoat thereon. Embodiments of the present invention further include magnetic recording media comprising Ni—P plated aluminum, Ni-plated glass or non-conductive substrates including glass, glass-ceramic and ceramic materials. Embodiments of the present invention further include a dual protective overcoat system having a combined thickness less than about 100 Å, such as less than about 75 Å, e.g., less than about 50 Å, with the SiC corrosion barrier layer having a thickness ranging from 1 Å to 40 Å.

    摘要翻译: 磁记录介质设置有双层保护外涂层系统,其包括SiC腐蚀阻挡层和其上的含碳保护外涂层。 SiC层有效地防止或显着减少Co和Ni扩散到介质表面。 实施例包括在磁性层上包含SiC腐蚀阻挡层的磁记录介质,无定形氢化碳的上覆保护层,无定形氮化碳或无定形氢化氮,以及其上的润滑剂面涂层。 本发明的实施例还包括包含Ni-P镀铝,镀Ni玻璃或包括玻璃,玻璃 - 陶瓷和陶瓷材料的非导电衬底的磁记录介质。 本发明的实施方案还包括双重保护外涂层系统,其具有小于约,例如小于约,例如小于约50埃的组合厚度,其中SiC腐蚀阻挡层的厚度范围为1 Å至40Å。

    Substantially isotropic magnetic recording medium comprising a seedlayer
    5.
    发明授权
    Substantially isotropic magnetic recording medium comprising a seedlayer 有权
    包括种子层的基本上各向同性的磁记录介质

    公开(公告)号:US6146754A

    公开(公告)日:2000-11-14

    申请号:US145762

    申请日:1998-09-02

    IPC分类号: G11B5/73 G11B5/84 G11B5/66

    摘要: A high areal density magnetic recording medium exhibiting high Hc, high SNR, high S* and substantially isotropic magnetic properties is achieved by depositing a thin seedlayer before depositing the underlayer. Embodiments include heating the seedlayer under vacuum in the presence of residual oxygen to induce appropriate crystalline orientation and surface morphology for nucleation and growth of the underlayer and magnetic layer having substantially isotropic magnetic properties.

    摘要翻译: 通过在沉积底层之前沉积薄的种子层,实现了表现出高Hc,高SNR,高S *和基本上各向同性磁性的高密度磁记录介质。 实施方案包括在存在残余氧的情况下在真空下加热种子层,以诱导适当的晶体取向和表面形态,用于具有基本上各向同性磁性的底层和磁性层的成核和生长。

    Magnetic recording medium with dual magnetic layers and high in-plane coercivity
    6.
    发明授权
    Magnetic recording medium with dual magnetic layers and high in-plane coercivity 失效
    具有双磁性层和高平面矫顽力的磁记录介质

    公开(公告)号:US06723374B2

    公开(公告)日:2004-04-20

    申请号:US10252708

    申请日:2002-09-24

    IPC分类号: C23C1432

    CPC分类号: G11B5/66 Y10S428/90

    摘要: A magnetic recording media is formed with high in-plane coercivity employing dual magnetic layers. The first magnetic layer is sputter deposited in a chamber employing a shield such that the minimum incident angle of impinging atoms is relatively large, e.g., greater than about 26°. Embodiments of the present invention comprise depositing a NiAl seedlayer, a Cr or Cr alloy underlayer and a first CoCrTa magnetic layer at a thickness less than about 50 Å for inducing the preferred (10.0) crystallographic orientation in the subsequently deposited second magnetic layer, e.g., CoCrPtTa or CoCrPtTaNb having a high Cr content of about 16 to about 21 at. %.

    摘要翻译: 使用双磁性层形成具有高的平面内矫顽力的磁记录介质。 将第一磁性层溅射沉积在采用屏蔽的腔室中,使得入射原子的最小入射角相对较大,例如大于约26°。 本发明的实施方案包括沉积NiAl种子层,Cr或Cr合金底层和厚度小于约的第一CoCrTa磁性层,用于在随后沉积的第二磁性层中诱导优选的(10.0)晶体取向,例如, CoCrPtTa或CoCrPtTaNb具有约16至约21at的高Cr含量。 %。