METHOD OF PREPARING GRAPHYNE
    1.
    发明申请

    公开(公告)号:US20230088084A1

    公开(公告)日:2023-03-23

    申请号:US17869360

    申请日:2022-07-20

    IPC分类号: C01B32/05 H01L29/16

    摘要: Disclosed is a method for preparing a graphyne including: supplying a precursor represented by the following Chemical Formula 1 to a chamber including a first zone and a second zone; vaporizing or subliming the precursor in the first zone; and depositing the precursor vaporized or sublimed in the second zone on a metal substrate to form the graphyne: (in Chemical Formula 1, X is carbon or nitrogen, and R1 to R3 may be selected from the group consisting of hydrogen, bromine, fluorine, chlorine, and iodine, respectively).