PLATING BATH COMPOSITION AND METHOD FOR ELECTROLESS PLATING OF PALLADIUM

    公开(公告)号:US20170321327A1

    公开(公告)日:2017-11-09

    申请号:US15522321

    申请日:2015-12-17

    IPC分类号: C23C18/44 C23C18/16

    CPC分类号: C23C18/44 C23C18/1646

    摘要: The present invention relates to an aqueous plating bath composition and a method for depositing a palladium layer by electroless plating onto a substrate. The aqueous plating bath composition according to the present invention comprises a source for palladium ions, a reducing agent for palladium ions and an aldehyde compound. The aqueous plating bath composition has an increased deposition rate for palladium while maintaining bath stability. The aqueous plating bath composition has also a prolonged life time. The aldehyde compounds of the present invention allow for adjusting the deposition rate to a constant range over the bath life time and for electrolessly depositing palladium layers at lower temperatures. The aldehyde compounds of the present invention activate electroless palladium plating baths having a low deposition rate and reactivate aged electroless palladium plating baths.

    Selective deposition and co-deposition processes for ferromagnetic thin films
    6.
    发明授权
    Selective deposition and co-deposition processes for ferromagnetic thin films 有权
    铁磁性薄膜的选择性沉积和共沉积工艺

    公开(公告)号:US09476124B2

    公开(公告)日:2016-10-25

    申请号:US14589487

    申请日:2015-01-05

    摘要: A method for selectively depositing a ferromagnetic layer on a conducting layer, includes providing a substrate including a conducting layer; preparing a solution including a metal salt; adding a complexing agent to the solution; adding a reducing agent to the solution; while a temperature of the solution is less than 75° C., immersing the substrate in the solution for a predetermined period to deposit a ferromagnetic layer on the conducting layer by electroless deposition, wherein the ferromagnetic layer comprises one of cobalt (Co), iron (Fe) or CoFe; and after the predetermined period, removing the substrate from the solution.

    摘要翻译: 一种用于在导电层上选择性沉积铁磁层的方法,包括提供包括导电层的衬底; 制备包含金属盐的溶液; 向溶液中加入络合剂; 向溶液中加入还原剂; 当溶液的温度低于75℃时,将基板浸入溶液中一定时间以通过无电沉积在导电层上沉积铁磁层,其中铁磁层包括钴(Co),铁 (Fe)或CoFe; 并且在预定时间段之后,从溶液中去除衬底。

    SELECTIVE DEPOSITION AND CO-DEPOSITION PROCESSES FOR FERROMAGNETIC THIN FILMS
    7.
    发明申请
    SELECTIVE DEPOSITION AND CO-DEPOSITION PROCESSES FOR FERROMAGNETIC THIN FILMS 有权
    氟化薄膜的选择性沉积和共沉淀法

    公开(公告)号:US20160194761A1

    公开(公告)日:2016-07-07

    申请号:US14589487

    申请日:2015-01-05

    摘要: A method for selectively depositing a ferromagnetic layer on a conducting layer, includes providing a substrate including a conducting layer; preparing a solution including a metal salt; adding a complexing agent to the solution; adding a reducing agent to the solution; while a temperature of the solution is less than 75° C., immersing the substrate in the solution for a predetermined period to deposit a ferromagnetic layer on the conducting layer by electroless deposition, wherein the ferromagnetic layer comprises one of cobalt (Co), iron (Fe) or CoFe; and after the predetermined period, removing the substrate from the solution.

    摘要翻译: 一种用于在导电层上选择性沉积铁磁层的方法,包括提供包括导电层的衬底; 制备包含金属盐的溶液; 向溶液中加入络合剂; 向溶液中加入还原剂; 当溶液的温度低于75℃时,将基板浸入溶液中一定时间以通过无电沉积在导电层上沉积铁磁层,其中铁磁层包括钴(Co),铁 (Fe)或CoFe; 并且在预定时间段之后,从溶液中去除衬底。

    USE OF TITANIA PRECURSOR COMPOSITION PATTERN
    10.
    发明申请
    USE OF TITANIA PRECURSOR COMPOSITION PATTERN 有权
    泰坦尼亚前驱体组合物图案的使用

    公开(公告)号:US20150197856A1

    公开(公告)日:2015-07-16

    申请号:US14153332

    申请日:2014-01-13

    摘要: A conductive metal pattern can be formed using a titania sol-gel obtained from a titania precursor composition having (a) a titanium alkoxide or titanium aryloxide, (b) a R(O)mCOCH2CO(O)nR′ compound wherein R and R′ are independently alkyl and m and n are independently 0 or 1, (c) water, (d) either an acid having a pKa less than 1 or a source of a halogen, and (e) a water-miscible organic solvent, on a substrate, wherein the molar amounts of (a) through (d) are sufficient to form a pattern of a titania sol-gel upon drying on the substrate. This pattern is contacted with electroless seed metal ions to form a pattern of electroless seed metal ions deposited within the pattern of titania sol-gel on the substrate, which electroless seed metal ions are exposed to electromagnetic radiation to reduce the electroless seed metal. The article is then subjected to electroless metal plating.

    摘要翻译: 导电金属图案可以使用由二氧化钛前体组合物获得的二氧化钛溶胶凝胶,所述二氧化钛前体组合物具有(a)钛醇盐或芳基氧化钛,(b)R(O)mCOCH 2 CO(O)n R'化合物,其中R和R' 独立地为烷基,m和n独立地为0或1,(c)水,(d)pKa小于1的酸或卤素源,和(e)水混溶性有机溶剂, 底物,其中(a)至(d)的摩尔量足以在基材上干燥后形成二氧化钛溶胶 - 凝胶图案。 这种图案与无电子种子金属离子接触以形成沉积在基底上的二氧化钛溶胶 - 凝胶图案内的无电子种子金属离子的图案,其中无电子种子金属离子暴露于电磁辐射以减少无电子种子金属。 然后将该制品进行化学镀金属。