ROTATION VELOCITY SENSOR AND METHOD FOR SENSING ROTATION VELOCITY
    3.
    发明申请
    ROTATION VELOCITY SENSOR AND METHOD FOR SENSING ROTATION VELOCITY 审中-公开
    旋转速度传感器和感测旋转速度的方法

    公开(公告)号:US20160102978A1

    公开(公告)日:2016-04-14

    申请号:US14880527

    申请日:2015-10-12

    CPC classification number: G01C19/5726 G01C19/56

    Abstract: A rotation velocity sensor includes a driving unit, a proof mass, a rotation sensing element, a compensating unit, and a rotation sensing unit. The driving unit generates a vibration driving signal and a reference signal. The proof mass is driven by the vibration driving signal to vibrate in a first direction. The rotation sensing element senses a vibration of the proof mass to generate a charge signal which corresponds to a portion of the vibration of the proof mass in a second direction orthogonal to the first direction. The compensating unit generates a compensation signal according to the reference signal. The rotation sensing unit converts the charge signal to a voltage signal or a current signal, and compensates the voltage signal or the current signal according to the compensation signal to cancel a noise in the second direction.

    Abstract translation: 旋转速度传感器包括驱动单元,检测质量块,旋转感测元件,补偿单元和旋转感测单元。 驱动单元产生振动驱动信号和参考信号。 检测质量由振动驱动信号驱动,以沿第一方向振动。 旋转检测元件感测证明物质的振动,以产生对应于在与第一方向正交的第二方向上的证明物质的振动的一部分的电荷信号。 补偿单元根据参考信号生成补偿信号。 旋转感测单元将充电信号转换为电压信号或电流信号,并根据补偿信号补偿电压信号或电流信号,以消除第二方向的噪声。

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