公开(公告)号：US09460930B2

公开(公告)日：2016-10-04

申请号：US14159386

申请日：2014-01-20

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Nang-Lyeom Oh ,  Je-Kil Ryu ,  Alexander Voronov ,  Gyoo-Wan Han

IPC: H01L21/00 ,  H01L21/268 ,  B23K26/06 ,  H01L21/02

CPC classification number: H01L21/268 ,  B23K26/0648 ,  H01L21/02532 ,  H01L21/02675 ,  H01L21/02691

Abstract: A method for performing a laser crystallization is provided. The method includes generating a laser beam, refracting the laser beam to uniformize an intensity of the laser beam at a focal plane of the laser beam. The laser beam whose intensity is uniformized is applied into an object substrate mounted with a stage.

Abstract translation: 提供了一种执行激光结晶的方法。 该方法包括产生激光束，折射激光束以使激光束在激光束的焦平面处的强度均匀化。 将其强度均匀化的激光束施加到安装有台的对象基板中。

公开(公告)号：US20150017816A1

公开(公告)日：2015-01-15

申请号：US14159386

申请日：2014-01-20

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Nang-Lyeom Oh ,  Je-Kil Ryu ,  Alexander Voronov ,  Gyoo-Wan Han

IPC: H01L21/268 ,  H01L21/263

CPC classification number: H01L21/268 ,  B23K26/0648 ,  H01L21/02532 ,  H01L21/02675 ,  H01L21/02691

Abstract: A method for performing a laser crystallization is provided. The method includes generating a laser beam, refracting the laser beam to uniformize an intensity of the laser beam at a focal plane of the laser beam. The laser beam whose intensity is uniformized is applied into an object substrate mounted with a stage.

Abstract translation: 提供了一种执行激光结晶的方法。 该方法包括产生激光束，折射激光束以使激光束在激光束的焦平面处的强度均匀化。 将其强度均匀化的激光束施加到安装有台的对象基板中。