Bonding head and a bonding apparatus having the same

    公开(公告)号:US11456273B2

    公开(公告)日:2022-09-27

    申请号:US16682840

    申请日:2019-11-13

    Abstract: A bonding head for performing a thermal compression process including a base body. A bonding heater is disposed on the base body that generates a melting heat. A bonding tool is disposed on the bonding heater that compresses a bonding object against a bonding base while transferring the melting heat to the bonding object to thereby bond the bonding object to the bonding base by the thermal compression process. A heat controller is disposed at the bonding tool, and a thermal conductivity of the heat controller is less than a thermal conductivity of the bonding tool.

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