PHOTORESIST COATING APPARATUS
    2.
    发明公开

    公开(公告)号:US20240213055A1

    公开(公告)日:2024-06-27

    申请号:US18524164

    申请日:2023-11-30

    CPC classification number: H01L21/6715 G03F7/162 H01L21/67051 H01L21/67225

    Abstract: A photoresist coating apparatus includes a photoresist trap tank temporarily storing a photoresist. A photoresist supply pipe is connected to the photoresist trap tank. A pump is connected to the photoresist supply pipe. A photoresist pressing device is connected to the photoresist supply pipe at a rear of the pump. A photoresist circulation pipe is at a rear of the photoresist pressing device. The photoresist circulation pipe connects the photoresist supply pipe to the photoresist trap tank. A photoresist discharge pipe is connected to the photoresist supply pipe at a rear of the photoresist circulation pipe. A photoresist discharge valve is connected to the photoresist discharge pipe. A photoresist discharge nozzle is connected to the photoresist discharge valve.

    ELECTRONIC APPARATUS AND METHOD FOR CONTROLLING THEREOF

    公开(公告)号:US20220312216A1

    公开(公告)日:2022-09-29

    申请号:US17751977

    申请日:2022-05-24

    Abstract: An electronic apparatus is disclosed. The electronic apparatus includes: a communication interface comprising communication circuitry, and a processor configured to: identify strength of a signal received from an external device through the communication interface, based on the strength of the identified signal being greater than or equal to a threshold value, unlock authorization restriction on the electronic apparatus, wherein the processor is further configured to: based on the strength of the identified signal being less than the threshold value, maintain the authorization restriction, and based on authentication of the electronic apparatus being completed after the signal is received, adjust the threshold value based on strength of at least one signal received from the external device before the signal is received.

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