公开(公告)号：US20240310739A1

公开(公告)日：2024-09-19

申请号：US18436127

申请日：2024-02-08

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kyoungwhan OH ,  Ho Young KIM ,  Sunghwan KIM ,  Jaekyung PARK ,  Jaehong LEE ,  Yohan CHOE

IPC: G03F7/00 ,  G03F7/20

CPC classification number: G03F7/70725 ,  G03F7/2043 ,  G03F7/70808

Abstract: A substrate processing apparatus includes a substrate stage configured to support a semiconductor substrate, the substrate stage being rotatable at a predetermined angular velocity, and a discharge device above the substrate stage, the discharge device being configured to discharge a chemical solution onto the semiconductor substrate, and the discharge device including a nozzle arm movable along a radial direction from a central region of the substrate stage to a peripheral region surrounding the central region, a nozzle on the nozzle arm, the nozzle facing the substrate stage, and the nozzle being configured to discharge the chemical solution onto the semiconductor substrate at a predetermined angle relative to a surface of the semiconductor substrate, and an angle changer configured to change the predetermined angle such that the predetermined angle gradually decreases as the nozzle arm moves from the central region to the peripheral region.

公开(公告)号：US20240213055A1

公开(公告)日：2024-06-27

申请号：US18524164

申请日：2023-11-30

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Heeyun CHOI ,  Kyoungwhan OH ,  Hokyun KIM ,  Junhee LEE ,  Yohan CHOE

IPC: H01L21/67 ,  G03F7/16

CPC classification number: H01L21/6715 ,  G03F7/162 ,  H01L21/67051 ,  H01L21/67225

Abstract: A photoresist coating apparatus includes a photoresist trap tank temporarily storing a photoresist. A photoresist supply pipe is connected to the photoresist trap tank. A pump is connected to the photoresist supply pipe. A photoresist pressing device is connected to the photoresist supply pipe at a rear of the pump. A photoresist circulation pipe is at a rear of the photoresist pressing device. The photoresist circulation pipe connects the photoresist supply pipe to the photoresist trap tank. A photoresist discharge pipe is connected to the photoresist supply pipe at a rear of the photoresist circulation pipe. A photoresist discharge valve is connected to the photoresist discharge pipe. A photoresist discharge nozzle is connected to the photoresist discharge valve.