公开(公告)号：US20180267409A1

公开(公告)日：2018-09-20

申请号：US15986901

申请日：2018-05-23

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jung-Min OH ,  Mi-Hyun PARK ,  Hyo-San LEE ,  Ji-Hoon JEONG ,  Yong-Sun KO ,  In-Gi KIM ,  Na-Rim KIM ,  Sang-Tae KIM ,  Seong-Min KIM ,  Kyong-Ho LEE

IPC: G03F7/42 ,  H01L29/16 ,  H01L21/8238 ,  H01L21/311 ,  G03F7/039 ,  H01L21/266

CPC classification number: G03F7/426 ,  G03F7/039 ,  G03F7/42 ,  G03F7/422 ,  G03F7/425 ,  H01L21/266 ,  H01L21/31133 ,  H01L21/823814 ,  H01L21/823828 ,  H01L29/16

Abstract: A composition for removing photoresist, including an alkyl ammonium fluoride salt in an amount ranging from about 0.5 weight percent to about 10 weight percent, based on a total weight of the composition; an organic sulfonic acid in an amount ranging from about 1 weight percent to about 20 weight percent, based on the total weight of the composition; and a lactone-based solvent in an amount ranging from about 70 weight percent to about 98.5 weight percent, based on the total weight of the composition.

公开(公告)号：US20160202610A1

公开(公告)日：2016-07-14

申请号：US14992061

申请日：2016-01-11

Applicant: Samsung Electronics Co., Ltd. ,  DONGWOO FINE-CHEM

Inventor： Ahn-Ho LEE ,  Seung-Hyun AHN ,  Jin-Seok YANG ,  Sang-Tae KIM ,  Shi-Jin SUNG ,  Kyong-Ho LEE

IPC: G03F7/16 ,  H01L21/311 ,  H01L21/768 ,  H01L21/02

CPC classification number: G03F7/168 ,  G03F7/091 ,  G03F7/162 ,  H01L21/02087 ,  H01L21/0276 ,  H01L21/266 ,  H01L21/31133 ,  H01L21/31144 ,  H01L21/76802

Abstract: A thinner composition including an acetate-based compound in an amount in a range of about 30 weight percent to about 70 weight percent, a lactate-based compound in an amount in a range of about 1 weight percent to about 20 weight percent, a propionate-based compound in an amount in a range of about 30 weight percent to about 60 weight percent, and an ether-based additive in an amount in a range of about 10 ppm to about 500 ppm, based on a total amount of the composition.

Abstract translation: 一种较薄的组合物，其包含约30重量％至约70重量％范围内的量的乙酸酯基化合物，约1重量％至约20重量％范围内的量的乳酸盐基化合物，丙酸酯 基于化合物，其量为约30重量％至约60重量％，基于组合物总量的约10ppm至约500ppm范围内的醚类添加剂。