公开(公告)号：US12236574B2

公开(公告)日：2025-02-25

申请号：US17461610

申请日：2021-08-30

Applicant: SEMES CO., LTD.

Inventor： Ohyeol Kwon ,  Soo Yeon Shin ,  Jihyun Lee ,  Chang Yul Cho

IPC: G06T7/00 ,  G06T3/10 ,  G06T7/50 ,  G06T11/00

Abstract: Disclosed is a substrate treating apparatus. The substrate treating apparatus includes an imaging unit that photographs loci of the one or more discharge liquids discharged from the plurality of nozzles, and an inspection unit that calculates impact points of the one or more discharge liquids discharged from the plurality of nozzles and determines whether the impact points of the one or more discharge liquids discharged from the plurality of nozzles are normal. The inspection unit includes an image synthesizing unit that synthesizes a plurality of images captured by the imaging unit, a pre-processing unit that pre-processes image data generated through the image synthesizing unit, and a calculation unit that calculates whether the impact points of the one or more discharge liquids discharged from the plurality of nozzles are normal by comparing the image data pre-processed by the pre-processing unit.

公开(公告)号：US20190006213A1

公开(公告)日：2019-01-03

申请号：US16126188

申请日：2018-09-10

Applicant: Semes Co., Ltd.

Inventor： Tae Suk YUN ,  Byung Un Kim ,  Chang Yul Cho

IPC: H01L21/67

Abstract: Provided is a substrate treatment apparatus including a housing, a supporting unit located inside the housing and supporting a substrate, a nozzle unit supplying chemicals to the substrate disposed on the supporting unit, and a chemical supplying unit supplying the chemicals to the nozzle unit. Herein, the chemical supplying unit includes a chemical supply source, a first tank and a second tank storing the chemicals, a chemical supplying line supplying the chemicals from the chemical supply source to the first tank and the second tank, a chemical discharge line supplying the chemicals from the first tank and the second tank to the nozzle unit, a circulation line allowing the chemicals to circulate through the first tank and the second tank, respectively, a member installed on the circulation line, and a controller controlling the member.