公开(公告)号：US20220410572A1

公开(公告)日：2022-12-29

申请号：US17849838

申请日：2022-06-27

Applicant: SEMES CO., LTD.

Inventor： Cheon Su Cho ,  Woo Young Ko

IPC: B41J2/165 ,  C23C16/02 ,  C23C16/46 ,  C23C16/52 ,  C23C16/458 ,  B41J11/00

Abstract: Disclosed are a method for preheating a substrate treating apparatus capable of shortening a preheating time and simultaneously performing a maintenance operation, and a computer program for the same. The method includes setting a parameter related to preheating of a preheating target component among components constituting the substrate treating apparatus; and preheating the preheating target component based on the set parameter, wherein a movement range of the preheating target component is limited to a value within a movable range.

公开(公告)号：US12097525B2

公开(公告)日：2024-09-24

申请号：US17960394

申请日：2022-10-05

Applicant: SEMES CO., LTD.

Inventor： Cheon Su Cho

IPC: B05C11/00 ,  B05C5/02

CPC classification number: B05C11/00 ,  B05C5/0208

Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a head unit configured to discharge an ink to a substrate; a supply unit configured to supply the ink to the head unit and including a reservoir having an inner space; and a pressure adjusting unit configured to adjust a pressure of the inner space, and wherein the pressure adjusting unit comprises: a first pressure adjusting unit; and a second pressure adjusting unit in which a size for changing a pressure of the inner space per unit time is greater than the first pressure adjusting unit.

公开(公告)号：US20240075740A1

公开(公告)日：2024-03-07

申请号：US18225668

申请日：2023-07-24

Applicant: SEMES CO., LTD.

Inventor： Jang Mi WOO ,  Jin Hyuck Yang ,  Yong Kyu Cho ,  Cheon Su Cho ,  Ki Hoon Choi

IPC: B41J2/14 ,  B41J2/045

CPC classification number: B41J2/1433 ,  B41J2/04563 ,  B41J2/04581 ,  B41J2/16579

Abstract: An inkjet head unit capable of performing high-resolution pixel printing on a large-size substrate and a substrate treatment apparatus including the inkjet head unit are provided. The substrate treatment apparatus includes: a processing unit supporting and moving a substrate; an inkjet head unit performing pixel printing on the substrate; and a gantry unit moving the inkjet head unit over the substrate, wherein the inkjet head unit includes head packs, which include a plurality of nozzles ejecting a substrate treatment liquid onto the substrate, and a head base, in which the head packs are installed and the head packs are disposed in a single row in the head base.