公开(公告)号：US20250091062A1

公开(公告)日：2025-03-20

申请号：US18783344

申请日：2024-07-24

Applicant: SEMES CO., LTD.

Inventor： Jae Hyun LIM ,  Dae Sung KIM ,  Jong Gu LEE ,  Jae Ho LEE ,  Nak Hyun SONG

IPC: B05B3/18 ,  B05B1/28 ,  B05C13/00

Abstract: A nozzle module includes a base portion; a nozzle portion disposed on the base portion, and including a first body, and a nozzle portion reciprocating in a first movement direction; and a vessel unit disposed to face the nozzle portion, and including a second body reciprocating in a second movement direction, and an accommodation portion concavely formed inwardly from an upper surface of the second body.

公开(公告)号：US20240427250A1

公开(公告)日：2024-12-26

申请号：US18750169

申请日：2024-06-21

Applicant: SEMES CO., LTD.

Inventor： Jae Ho LEE ,  Jong Gu LEE ,  Dae Sung KIM ,  Jae Hyun LIM ,  Nak Hyun SONG

IPC: G03F7/16 ,  G03F7/00

Abstract: Disclosed is an apparatus for treating a substrate, the apparatus including: a housing having an inner space; a plurality of outer cups arranged in a row in the inner space, each having a processing space; a spin chuck for supporting and rotating a substrate in each of the processing spaces; and a treatment solution nozzle provided in a plurality to correspond to the plurality of outer cups, respectively, and for supplying a treatment solution onto the substrate supported by the spin chuck, in which the outer cup includes a sidewall surrounding the spin chuck, the sidewall includes a first region and a second region located adjacent to each other along a circumferential direction thereof, and the outer cup includes a first protrusion installed in the first region while extending upwardly on a top end of the sidewall.