公开(公告)号：US12040216B2

公开(公告)日：2024-07-16

申请号：US17386829

申请日：2021-07-28

Applicant: SEMES Co., Ltd.

Inventor： Yong Hoon Hong ,  Kang Suk Lee ,  Hyeon Jun Lee ,  So Young Jang

IPC: H01L21/687 ,  H01L21/67

CPC classification number: H01L21/68742 ,  H01L21/67023 ,  H01L21/68792 ,  H01L21/67051 ,  H01L21/67253

Abstract: A substrate supporting member capable of controlling the flow of charges on a substrate by controlling ground resistance values of a guide pin and a support pin using a variable resistor, and a substrate treating apparatus including the same are provided. The substrate supporting member includes the body; a support pin installed on the body and for supporting the substrate; a guide pin installed on the body and for supporting the substrate; and a charge control device for controlling a charge around the substrate by controlling an electrical connection between the support pin and a first resistor and an electrical connection between the guide pin and a second resistor.