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公开(公告)号:US20220250908A1
公开(公告)日:2022-08-11
申请号:US17595708
申请日:2021-02-17
Applicant: SHOWA DENKO K.K.
Inventor: Yosuke TANIMOTO , Hideyuki KURIHARA
Abstract: Provided is a sulfur dioxide mixture that hardly corrodes metals. A sulfur dioxide mixture contains sulfur dioxide and water. The sulfur dioxide mixture is filled in a filling container in such a manner that a gas phase and a liquid phase exist, and the moisture concentration of the gas phase is from 0.005 mole ppm to less than 5,000 mole ppm.
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公开(公告)号:US20210230010A1
公开(公告)日:2021-07-29
申请号:US17054548
申请日:2019-06-04
Applicant: SHOWA DENKO K.K.
Inventor: Jun DOU , Saki MOURI , Hideyuki KURIHARA
IPC: C01B35/06
Abstract: There is provided a method of producing boron trichloride, in which damage to a reaction container is inhibited. The method of producing boron trichloride includes performing reaction between chlorine gas in a gas containing the chlorine gas and particulate boron carbide (4) in a state in which the boron carbide (4) flows in the gas containing the chlorine gas.
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公开(公告)号:US20190330069A1
公开(公告)日:2019-10-31
申请号:US16306227
申请日:2017-05-30
Applicant: SHOWA DENKO K.K.
Inventor: Saki MOURI , Hideyuki KURIHARA
IPC: C01B35/06
Abstract: Provided is a method for producing boron trichloride capable of efficiently producing boron trichloride by suppressing the generation of byproducts resulting from water by sufficiently removing water from a reaction system. The method for producing boron trichloride includes: a dehydration step of bringing a chlorine-containing gas which contains chlorine gas and has a water content of 1 ppm by volume or less into contact with boron carbide at a temperature lower than a generation starting temperature at which the generation of the boron trichloride starts by the reaction between the boron carbide and the chlorine gas, and allowing water in the boron carbide to react with the chlorine gas in the chlorine-containing gas to remove the water contained in the boron carbide; and a generation step of allowing the boron carbide dehydrated in the dehydration step to react with the chlorine gas to generate boron trichloride.
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公开(公告)号:US20190003046A1
公开(公告)日:2019-01-03
申请号:US16065257
申请日:2016-12-26
Applicant: SHOWA DENKO K.K.
Inventor: Yosuke TANIMOTO , Hideyuki KURIHARA
Abstract: A method of cleaning a SiC monocrystal growth furnace provided with an in-furnace substrate composed of a 3C-SiC polycrystal having at least a surface in which an intensity ratio of a (111) plane with respect to other crystal planes is at least 85% but not more than 100% according to powder XRD analysis, the method including flowing a mixed gas of fluorine gas and at least one of an inert gas and air in a non-plasma state through the inside of the SiC monocrystal growth furnace, thereby selectively removing a SiC deposit deposited inside the SiC monocrystal growth furnace, wherein the mixed gas comprises at least 1 vol % but not more than 20 vol % of fluorine gas, and at least 80 vol % but not more than 99 vol % of an inert gas, and a temperature inside the SiC monocrystal growth furnace is from 200° C. to 500° C.
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公开(公告)号:US20210309520A1
公开(公告)日:2021-10-07
申请号:US17267255
申请日:2019-09-12
Applicant: SHOWA DENKO K.K.
Inventor: Hideyuki KURIHARA
Abstract: A nitrous oxide purification method includes a step of performing gas separation by introducing a mixed gas containing nitrous oxide into a gas separation membrane including a polymer material to cause nitrous oxide to selectively permeate the gas separation membrane.
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公开(公告)号:US20210246040A1
公开(公告)日:2021-08-12
申请号:US17052844
申请日:2019-06-04
Applicant: SHOWA DENKO K.K.
Inventor: Saki MOURI , Hideyuki KURIHARA
IPC: C01B35/06
Abstract: There is provided a method of producing boron trichloride, in which boron trichloride with high purity can be produced in simple production steps, and blockage of a production line is inhibited. The method of producing boron trichloride includes: a metal chlorination step of bringing a gas containing chlorine gas into contact with raw boron carbide as boron carbide including, as an impurity, a metal other than boron, and allowing the metal to react with the chlorine gas in the gas containing the chlorine gas, to form a metal chloride and to obtain boron carbide containing the metal chloride; a removal step of removing the metal chloride from the boron carbide containing the metal chloride, obtained in the metal chlorination step; and a generation step of bringing a gas containing chlorine gas into contact with the boron carbide from which the metal chloride has been removed in the removal step, and allowing the boron carbide and the chlorine gas in the gas containing the chlorine gas to react with each other to generate boron trichloride.
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