Magnetic recording medium fabrication method and apparatus

    公开(公告)号:US09646643B2

    公开(公告)日:2017-05-09

    申请号:US14171937

    申请日:2014-02-04

    Inventor: Ichiro Ota

    CPC classification number: G11B5/8408 H01F41/308

    Abstract: A method of fabricating a magnetic recording medium sequentially forms a magnetic recording layer, a protection layer, and a lubricant layer on a stacked body. The lubricant layer is formed on a surface of the protection layer by vapor-phase lubrication without exposing the stacked body to atmosphere after forming the protection layer on the stacked body. Nitrogen atoms or oxygen atoms are injected onto the surface of the protection layer after forming the protection layer and before forming the lubricant layer.

    Carbon film forming apparatus, carbon film forming method, and magnetic recording medium manufacturing method

    公开(公告)号:US10134435B2

    公开(公告)日:2018-11-20

    申请号:US14575385

    申请日:2014-12-18

    Inventor: Ichiro Ota

    Abstract: A carbon film forming method, that introduces a raw material gas including carbon into a film forming chamber, ionizes the gas by using an ion source, accelerates the ionized gas, and radiates the ionized gas to a surface of a substrate to form a carbon film on the surface of the substrate, includes forming the carbon film while rotating a first magnet, which is provided on the opposite side of the substrate across a region in which the raw material gas is ionized so as to be eccentric and/or inclined with respect to a central axis connecting the center of the ion source and a position corresponding to the center of the substrate held by the holder, in a circumferential direction.

    MAGNETIC RECORDING MEDIUM FABRICATION METHOD AND APPARATUS
    7.
    发明申请
    MAGNETIC RECORDING MEDIUM FABRICATION METHOD AND APPARATUS 审中-公开
    磁记录介质制造方法和装置

    公开(公告)号:US20140079877A1

    公开(公告)日:2014-03-20

    申请号:US14017387

    申请日:2013-09-04

    CPC classification number: G11B5/85 C23C14/564 G11B5/8408

    Abstract: A method of fabricating a magnetic recording medium sequentially forms a magnetic recording layer, a protection layer, and a lubricant layer on a stacked body. The lubricant layer is formed by vapor-phase lubrication without exposing the stacked body to atmosphere after forming the protection layer on the stacked body. A region having a gas pressure P3 is provided in a transport path of the stacked body after the formation of the protection layer and before the formation of the lubricant layer, satisfying relationships P3>P1 and P3>P2, where P1 denotes a process gas pressure at a time of forming the protection layer, and P2 denotes a process gas pressure at a time of forming the lubricant layer.

    Abstract translation: 制造磁记录介质的方法在层叠体上依次形成磁记录层,保护层和润滑层。 通过气相润滑形成润滑剂层,而不在层叠体上形成保护层后将层叠体暴露在大气中。 具有气体压力P3的区域在形成保护层之后并在形成润滑剂层之前设置在堆叠体的输送路径中,满足关系P3> P1和P3> P2,其中P1表示处理气体压力 在形成保护层时,P2表示形成润滑剂层时的工艺气体压力。

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