公开(公告)号：US20190218661A1

公开(公告)日：2019-07-18

申请号：US16249314

申请日：2019-01-16

Applicant: SILCOTEK CORP.

Inventor： Geoffrey K. WHITE ,  Lucas D. PATTERSON ,  Corey M. ROBINSON ,  William David GROVE ,  Nicholas Peter DESKEVICH

IPC: C23C16/22

CPC classification number: C23C16/22

Abstract: A spooled arrangement and a process of producing a spooled arrangement are disclosed. The spooled arrangement includes a substrate, the substrate being metal or metallic. The substrate has an inner surface and an outer surface, the inner surface and the outer surface being in a furled configuration to define the spooled arrangement. The inner surface and the outer surface have a coating, the coating being an amorphous silicon coating, a silicon-oxygen-carbon-containing coating, a silicon-nitrogen-containing coating, a silicon-fluorine-carbon-containing coating, or a combination thereof. The process includes producing the spooled arrangement.