SPOOLED ARRANGEMENT AND PROCESS OF PRODUCING A SPOOLED ARRANGEMENT

    公开(公告)号:US20190218661A1

    公开(公告)日:2019-07-18

    申请号:US16249314

    申请日:2019-01-16

    申请人: SILCOTEK CORP.

    IPC分类号: C23C16/22

    CPC分类号: C23C16/22

    摘要: A spooled arrangement and a process of producing a spooled arrangement are disclosed. The spooled arrangement includes a substrate, the substrate being metal or metallic. The substrate has an inner surface and an outer surface, the inner surface and the outer surface being in a furled configuration to define the spooled arrangement. The inner surface and the outer surface have a coating, the coating being an amorphous silicon coating, a silicon-oxygen-carbon-containing coating, a silicon-nitrogen-containing coating, a silicon-fluorine-carbon-containing coating, or a combination thereof. The process includes producing the spooled arrangement.

    CHEMICAL VAPOR DEPOSITION SYSTEM ARRANGEMENT
    3.
    发明申请
    CHEMICAL VAPOR DEPOSITION SYSTEM ARRANGEMENT 审中-公开
    化学蒸气沉积系统布置

    公开(公告)号:US20160053375A1

    公开(公告)日:2016-02-25

    申请号:US14818517

    申请日:2015-08-05

    申请人: SILCOTEK CORP.

    IPC分类号: C23C16/455 C23C16/48

    摘要: A chemical vapor deposition system, method and arrangement of systems are disclosed. The arrangement of chemical vapor deposition systems includes a first chemical vapor deposition system comprising a first coating chamber, a second chemical vapor deposition system comprising a second coating chamber, and a fluid introduction system comprising a vacuum pump and a fluid introduction arrangement arranged and disposed to introduce a fluid to one or both of the first coating chamber and the second coating chamber for chemical vapor deposition coating. At least a portion of the fluid introduction system is arranged for operation with the first chemical vapor deposition system and the second chemical vapor deposition system. The chemical vapor deposition method includes operating the second chemical vapor deposition system. The chemical vapor deposition system includes a non-cuboid coating chamber.

    摘要翻译: 公开了一种化学气相沉积系统,系统的方法和装置。 化学气相沉积系统的布置包括第一化学气相沉积系统,其包括第一涂覆室,包括第二涂覆室的第二化学气相沉积系统和包括真空泵和流体引入装置的流体引入系统, 将流体引入用于化学气相沉积涂层的第一涂覆室和第二涂覆室中的一个或两个。 流体引入系统的至少一部分被布置成与第一化学气相沉积系统和第二化学气相沉积系统一起操作。 化学气相沉积方法包括操作第二化学气相沉积系统。 化学气相沉积系统包括非长方体涂层室。