公开(公告)号：US10794738B2

公开(公告)日：2020-10-06

申请号：US16049262

申请日：2018-07-30

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Dario Paci ,  Francesco Procopio ,  Carlo Valzasina ,  Paolo Angelini ,  Francesco Diazzi ,  Roberto Pio Baorda ,  Danilo Karim Kaddouri

IPC: G01K15/00 ,  G01D18/00 ,  G01K13/00 ,  H05B3/16 ,  B81C99/00 ,  G01R33/00 ,  G01R33/09

Abstract: An integrated sensor device including a first die, housing a sensor element to detect a quantity external to the sensor device and transduce the external quantity into an electrical sensing signal; a second die mechanically coupled to the first die so that the first and second dies are stacked on one another along one and the same axis; and at least one heater of a resistive type integrated in the first die and/or in the second die, having a first conduction terminal and a second conduction terminal configured to couple respective first and second conduction terminals of a signal generator for causing an electric current to flow, in use, between the first and second conduction terminals of the heater and generate heat by the Joule effect. It is possible to carry out calibration in temperature of the sensor element.

公开(公告)号：US10054471B2

公开(公告)日：2018-08-21

申请号：US14498966

申请日：2014-09-26

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Dario Paci ,  Francesco Procopio ,  Carlo Valzasina ,  Paolo Angelini ,  Francesco Diazzi ,  Roberto Pio Baorda ,  Danilo Karim Kaddouri

IPC: G01N25/18 ,  G01D18/00 ,  G01K13/00 ,  H05B3/16 ,  B81C99/00 ,  G01R33/00 ,  G01R33/09

CPC classification number: G01D18/00 ,  B81B2207/012 ,  B81B2207/03 ,  B81C99/003 ,  G01K13/00 ,  G01R33/0017 ,  G01R33/09 ,  H05B3/16

Abstract: An integrated sensor device including a first die, housing a sensor element to detect a quantity external to the sensor device and transduce the external quantity into an electrical sensing signal; a second die mechanically coupled to the first die so that the first and second dies are stacked on one another along one and the same axis; and at least one heater of a resistive type integrated in the first die and/or in the second die, having a first conduction terminal and a second conduction terminal configured to couple respective first and second conduction terminals of a signal generator for causing an electric current to flow, in use, between the first and second conduction terminals of the heater and generate heat by the Joule effect. It is possible to carry out calibration in temperature of the sensor element.