公开(公告)号：US11965906B2

公开(公告)日：2024-04-23

申请号：US17866378

申请日：2022-07-15

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Gattere ,  Jean Marie Darmanin ,  Francesco Rizzini ,  Carlo Valzasina

IPC: G01P15/125 ,  G01P1/00 ,  G01P15/08 ,  G01P15/13

CPC classification number: G01P15/125 ,  G01P1/00 ,  G01P15/0802 ,  G01P15/131 ,  G01P2015/0831

Abstract: A closed-loop microelectromechanical accelerometer includes a substrate of semiconductor material, an out-of-plane sensing mass and feedback electrodes. The out-of-plane sensing mass, of semiconductor material, has a first side facing the supporting body and a second side opposite to the first side. The out-of-plane sensing mass is also connected to the supporting body to oscillate around a non-barycentric fulcrum axis parallel to the first side and to the second side and perpendicular to an out-of-plane sensing axis. The feedback electrodes are capacitively coupled to the sensing mass and are configured to apply opposite electrostatic forces to the sensing mass.

公开(公告)号：US11698388B2

公开(公告)日：2023-07-11

申请号：US17122793

申请日：2020-12-15

Applicant: STMicroelectronics S.r.l.

Inventor： Jean Marie Darmanin ,  Carlo Valzasina ,  Alessandro Tocchio ,  Gabriele Gattere

IPC: G01P15/125 ,  G01P15/00

CPC classification number: G01P15/125

Abstract: A micromechanical device includes a semiconductor body, a first mobile structure, an elastic assembly, coupled to the first mobile structure and to the semiconductor body and adapted to undergo deformation in a direction, and at least one abutment element. The elastic assembly is configured to enable an oscillation of the first mobile structure as a function of a force applied thereto. The first mobile structure, the abutment element and the elastic assembly are arranged with respect to one another in such a way that: when the force is lower than a force threshold, the elastic assembly operates with a first elastic constant; and when the force is greater than the threshold force, then the first mobile structure is in contact with the abutment element, and a deformation of the elastic assembly is generated, which operates with a second elastic constant different from the first elastic constant.