公开(公告)号：US20040121504A1

公开(公告)日：2004-06-24

申请号：US10650275

申请日：2003-08-27

Applicant: STMicroelectronics S.r.l. ,  Nokia Corporation

Inventor： Sarah Zerbini ,  Angelo Merassi ,  Guido Spinola Durante ,  Biagio De Masi

IPC: H01L021/66 ,  G01R031/26 ,  H01L021/00

CPC classification number: H01H1/0036 ,  G01P1/023 ,  G01P15/06 ,  G01P15/0802 ,  G01P15/0891 ,  G01P15/18 ,  G01P2015/0814 ,  H01H35/146

Abstract: A process for the fabrication of an inertial sensor with failure threshold includes the step of forming, on top of a substrate of a semiconductor wafer, a sample element embedded in a sacrificial region, the sample element configured to break under a preselected strain. The process further includes forming, on top of the sacrificial region, a body connected to the sample element and etching the sacrificial region so as to free the body and the sample element. The process may also include forming, on the substrate, additional sample elements connected to the body.

Abstract translation: 用于制造具有故障阈值的惯性传感器的方法包括在半导体晶片的衬底的顶部上形成嵌入在牺牲区域中的样品元件的步骤，所述样品元件构造成在预选应变下断裂。 该方法还包括在牺牲区域的顶部上形成连接到样品元件的主体并蚀刻牺牲区域以释放身体和样品元件。 该方法还可以包括在基底上形成连接到身体的附加样品元件。

公开(公告)号：US20040035204A1

公开(公告)日：2004-02-26

申请号：US10443647

申请日：2003-05-21

Applicant: STMicroelectronics S.r.l.

Inventor： Guido Spinola Durante ,  Sarah Zerbini ,  Angelo Merassi

IPC: G01P009/04

CPC classification number: G01C19/5719

Abstract: An integrated gyroscope, including an acceleration sensor formed by: a driving assembly; a sensitive mass extending in at least one first and second directions and being moved by the driving assembly in the first direction; and by a capacitive sensing electrode, facing the sensitive mass. The acceleration sensor has an rotation axis parallel to the second direction, and the sensitive mass is sensitive to forces acting in a third direction perpendicular to the other directions. The capacitive sensing electrode is formed by a conductive material region extending underneath the sensitive mass and spaced therefrom by an air gap.

Abstract translation: 一种集成陀螺仪，包括加速度传感器，该加速度传感器由以下部件构成：驱动组件; 在至少一个第一和第二方向上延伸并被驱动组件沿第一方向移动的敏感物质; 并通过电容式感测电极面对敏感质量。 加速度传感器具有平行于第二方向的旋转轴，并且敏感质量对垂直于其它方向的第三方向作用的力敏感。 电容感测电极由传导材料区域形成，导电材料区域延伸在敏感质量块的下方并与气隙隔开。