公开(公告)号：US10068923B2

公开(公告)日：2018-09-04

申请号：US15190919

申请日：2016-06-23

Applicant: Samsung Display Co., Ltd.

Inventor： Seung-Ho Jung ,  Chaun-Gi Choi ,  Hyeon-Sik Kim ,  Hye-Young Park ,  Hye-Hyang Park ,  Hui-Won Yang ,  Eun-Young Lee ,  Joo-Hee Jeon ,  Su-Kyoung Yang ,  Chan-Woo Yang

IPC: H01L27/12 ,  H01L29/786 ,  H01L27/32

Abstract: A transparent display device includes a base substrate having a pixel area and a transmission area, a barrier layer disposed on the base substrate, a pixel circuit disposed in the pixel area, a display structure disposed on the pixel circuit, a transmitting structure disposed in the transmission area, an adhesive layer disposed between the base substrate and the barrier layer, and between the base substrate and the transmitting structure, and a transmitting window defined in the transmission area where the transmitting structure may include a composition including silicon oxynitride, the adhesive layer may include aluminum oxide, and the transmitting window may expose a surface of the transmitting structure.

公开(公告)号：US20170098567A1

公开(公告)日：2017-04-06

申请号：US15178427

申请日：2016-06-09

Applicant: Samsung Display Co., Ltd.

Inventor： Su-Kyoung Yang ,  Gyung-Min Baek ,  Yoon-Yong Park ,  Chang-Oh Jeong

IPC: H01L21/683 ,  C23C14/50 ,  C23C16/458

CPC classification number: H01L21/6833 ,  C23C14/50 ,  C23C16/4586

Abstract: An electrostatic chuck and a substrate processing apparatus including the same are disclosed. In one aspect, the electrostatic chuck includes a stage configured to support a substrate including a panel formation region and a dummy region surrounding the panel formation region. The electrostatic chuck includes a substrate fixing unit including a plurality of electrode patterns insulated from the substrate and spaced apart from one another, the substrate fixing unit at least partially overlapping the dummy region of the substrate and not overlapping the panel formation region of the substrate.

公开(公告)号：US10403536B2

公开(公告)日：2019-09-03

申请号：US15178427

申请日：2016-06-09

Applicant: Samsung Display Co., Ltd.

Inventor： Su-Kyoung Yang ,  Gyung-Min Baek ,  Joon-Yong Park ,  Chang-Oh Jeong

IPC: H01L21/683 ,  C23C14/50 ,  C23C16/458

Abstract: An electrostatic chuck and a substrate processing apparatus including the same are disclosed. In one aspect, the electrostatic chuck includes a stage configured to support a substrate including a panel formation region and a dummy region surrounding the panel formation region. The electrostatic chuck includes a substrate fixing unit including a plurality of electrode patterns insulated from the substrate and spaced apart from one another, the substrate fixing unit at least partially overlapping the dummy region of the substrate and not overlapping the panel formation region of the substrate.

公开(公告)号：US09748283B2

公开(公告)日：2017-08-29

申请号：US14664232

申请日：2015-03-20

Applicant: Samsung Display Co., LTD.

Inventor： Su-Kyoung Yang ,  Sang-Won Shin ,  Hyun-Eok Shin ,  Chan-Woo Yang ,  Dong-Min Lee

IPC: H01L21/28 ,  H01L27/12 ,  H01L29/66 ,  H01L29/49 ,  H01L29/423 ,  H01L29/45 ,  C23C14/02 ,  C23C14/58 ,  C23C14/54 ,  H01J37/34

CPC classification number: H01L27/1259 ,  C23C14/02 ,  C23C14/541 ,  C23C14/5806 ,  H01J37/34 ,  H01L21/28008 ,  H01L29/42356 ,  H01L29/42372 ,  H01L29/42384 ,  H01L29/45 ,  H01L29/4908 ,  H01L29/495 ,  H01L29/66742

Abstract: In a method of manufacturing a thin film transistor substrate, a first metal layer is formed on a first surface of a base substrate. The base substrate is cooled by contacting the first metal layer with a first cooling plate and by contacting a second surface of the base substrate with a second cooling plate. The first and second surfaces of the base substrate face opposite directions. A gate electrode is formed by patterning the first metal layer. A source electrode and a drain electrode are formed. The source electrode is spaced apart from the drain electrode. The source and drain electrodes partially overlap the gate electrode. A pixel electrode electrically connected to the drain electrode is formed.