公开(公告)号：US09318510B2

公开(公告)日：2016-04-19

申请号：US14493241

申请日：2014-09-22

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Kyung-Seop Kim ,  Byeong-Beom Kim ,  Sang-Won Shin ,  Dae-Young Lee ,  Chang-Oh Jeong ,  Joon-Yong Park ,  Dong-Min Lee

IPC: H01L27/12 ,  H01L29/786 ,  H01L29/66 ,  H01L29/45 ,  H01L29/49

CPC classification number: H01L27/124 ,  H01L27/1214 ,  H01L27/1244 ,  H01L27/1251 ,  H01L29/45 ,  H01L29/4908 ,  H01L29/66757 ,  H01L29/66765 ,  H01L29/66969 ,  H01L29/78669 ,  H01L29/7869 ,  Y10T428/2944

Abstract: A metal wire included in a display device, the metal wire includes a first metal layer including a nickel-chromium alloy, a first transparent oxide layer disposed on the first metal layer, and a second metal layer disposed on the first transparent oxide layer.

Abstract translation: 包括在显示装置中的金属线，金属线包括：第一金属层，包括镍 - 铬合金，设置在第一金属层上的第一透明氧化物层和设置在第一透明氧化物层上的第二金属层。

公开(公告)号：US10403536B2

公开(公告)日：2019-09-03

申请号：US15178427

申请日：2016-06-09

Applicant: Samsung Display Co., Ltd.

Inventor： Su-Kyoung Yang ,  Gyung-Min Baek ,  Joon-Yong Park ,  Chang-Oh Jeong

IPC: H01L21/683 ,  C23C14/50 ,  C23C16/458

Abstract: An electrostatic chuck and a substrate processing apparatus including the same are disclosed. In one aspect, the electrostatic chuck includes a stage configured to support a substrate including a panel formation region and a dummy region surrounding the panel formation region. The electrostatic chuck includes a substrate fixing unit including a plurality of electrode patterns insulated from the substrate and spaced apart from one another, the substrate fixing unit at least partially overlapping the dummy region of the substrate and not overlapping the panel formation region of the substrate.

公开(公告)号：US20150091004A1

公开(公告)日：2015-04-02

申请号：US14493241

申请日：2014-09-22

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Kyung-Seop Kim ,  Byeong-Beom Kim ,  Sang-Won Shin ,  Dae-Young Lee ,  Chang-Oh Jeong ,  Joon-Yong Park ,  Dong-Min Lee

IPC: H01L27/12 ,  H01L29/66 ,  H01L29/786

CPC classification number: H01L27/124 ,  H01L27/1214 ,  H01L27/1244 ,  H01L27/1251 ,  H01L29/45 ,  H01L29/4908 ,  H01L29/66757 ,  H01L29/66765 ,  H01L29/66969 ,  H01L29/78669 ,  H01L29/7869 ,  Y10T428/2944

Abstract: A metal wire included in a display device, the metal wire includes a first metal layer including a nickel-chromium alloy, a first transparent oxide layer disposed on the first metal layer, and a second metal layer disposed on the first transparent oxide layer.

Abstract translation: 包括在显示装置中的金属线，金属线包括：第一金属层，包括镍 - 铬合金，设置在第一金属层上的第一透明氧化物层和设置在第一透明氧化物层上的第二金属层。