公开(公告)号：US11534790B2

公开(公告)日：2022-12-27

申请号：US15806609

申请日：2017-11-08

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sangjin Han ,  Eugene Kang ,  Junha Park ,  Mingyu Seo ,  Youjong Lee ,  Jongbun Han ,  Euna Ko ,  Sungjong Park

IPC: B05B15/68 ,  B05B13/00 ,  B05D1/02 ,  C23C16/458 ,  C23C16/455 ,  C23C14/24 ,  C23C14/54 ,  C23C14/50 ,  C23C16/448 ,  C23C14/04 ,  C23C14/12 ,  C23C16/44 ,  C23C16/46 ,  H01L51/00

Abstract: An apparatus for manufacturing a display apparatus includes a deposition source, a nozzle head, a substrate fixer, and a deposition preventer. The deposition source is outside the chamber and vaporizes or sublimates a deposition material. The nozzle head is in the chamber, is connected to the at least one deposition source, and simultaneously sprays the deposition material onto an entire surface of a display substrate. The substrate fixer is connected to the chamber and moves linearly, with the display apparatus is mounted on the substrate fixer. The deposition preventer is in the chamber surrounding an edge portion of the nozzle head and an edge portion of the substrate fixer. The deposition preventer is heated during a deposition process.

公开(公告)号：US20240026518A1

公开(公告)日：2024-01-25

申请号：US18296490

申请日：2023-04-06

Applicant: Samsung Display Co., Ltd.

Inventor： Dongwook Kim ,  Kwangho Park ,  Eugene Kang ,  Younghun Park ,  Seungjoo Baek ,  Dongyun Shin ,  Hyunwoo Jang ,  Jonghyun Jung

IPC: C23C14/04 ,  H10K71/16

CPC classification number: C23C14/042 ,  H10K71/166

Abstract: An apparatus for manufacturing a display device includes a mask assembly, and a deposition source including a deposition part that supplies deposition material to the mask assembly. The deposition part includes a deposition frame including an inner space, a crucible disposed in the inner space of the deposition frame to be withdrawn from the deposition frame and accommodating the deposition material, a nozzle connected to the crucible and that sprays the deposition material accommodated in the crucible, a first heating portion disposed in the inner space of the deposition frame and that heats the deposition material accommodated in the crucible, and a second heating portion being movable between a first position at which the nozzle is heated and a second position at which a withdrawal space so that the crucible is withdrawn from the deposition frame.

公开(公告)号：US10854815B2

公开(公告)日：2020-12-01

申请号：US16427091

申请日：2019-05-30

Applicant: Samsung Display Co., Ltd.

Inventor： Sangjin Han ,  Junha Park ,  Eugene Kang ,  Dongwook Kim ,  Cheollae Roh ,  Jaewan Seol ,  Seongho Jeong ,  Myungsoo Huh ,  Mingyu Seo

IPC: H01L21/00 ,  H01L27/00 ,  H01L51/00 ,  C23C14/04 ,  C23C14/24 ,  C23C14/54 ,  H01L21/66 ,  H01L27/32 ,  H01L51/56 ,  H01L51/50

Abstract: An apparatus for manufacturing a display apparatus includes: a chamber; a plurality of source units outside the chamber, wherein the plurality of source units which accommodate a deposition material and transform the deposition material into gas; a nozzle unit in the chamber, wherein the nozzle unit is connected to the plurality of source units and injects, into the chamber, the deposition material supplied from one of the plurality of source units; and a regulating unit between each of the plurality of source units and the nozzle unit, wherein the regulating unit interrupts the deposition material supplied from each of the plurality of source units to the nozzle unit and selectively connects the plurality of source units with the nozzle unit.