-
公开(公告)号:US20180071764A1
公开(公告)日:2018-03-15
申请号:US15651034
申请日:2017-07-17
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Su Cheol GONG , Min Goo KANG , Taek Kyo KANG , Jung Woo KO , Min Ju KIM , Young Eun RYU , Jae Suk MOON , Soo Hyun MIN
CPC classification number: B05B12/20 , B05C21/005 , B23K31/02 , B23K2103/04 , C23C14/042 , H01L51/0011 , H01L51/56
Abstract: A mask and a method of manufacturing a mask assembly, the mask including a body, and the body including one end and another end facing each other in a length direction and having a first surface and a second surface facing each other in a thickness direction; and a pattern region between the one end and the other end, the pattern region including a plurality of pattern holes and a plurality of ribs between the plurality of pattern holes, wherein a curl value of the mask, which is defined as a shortest distance from a plane tangent to a center of the body to the one end or the other end of the body, is 1,000 μm to 4,000 μm.
-
2.
公开(公告)号:US20180087143A1
公开(公告)日:2018-03-29
申请号:US15663318
申请日:2017-07-28
Applicant: Samsung Display Co., Ltd.
Inventor: Jae Suk MOON , Young Eun RYU , Soo Hyun MIN , Taek Kyo KANG , Min Ju KIM
CPC classification number: C23C14/042 , C23C14/24 , H01L51/0011 , H01L51/56
Abstract: A mask assembly includes: a mask frame; a mask supported by the mask frame, the mask including a plurality of pattern holes; and a magnetic part disposed on one surface of the mask. The magnetic part provides a magnetic force between the mask and a target substrate and improves an adhesion between the mask and the target substrate to prevent deposition defects.
-
公开(公告)号:US20200206765A1
公开(公告)日:2020-07-02
申请号:US16817325
申请日:2020-03-12
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Su Cheol GONG , Min Goo KANG , Taek Kyo KANG , Jung Woo KO , Min Ju KIM , Young Eun RYU , Jae Suk MOON , Soo Hyun MIN
Abstract: A mask and a method of manufacturing a mask assembly, the mask including a body, and the body including one end and another end facing each other in a length direction and having a first surface and a second surface facing each other in a thickness direction; and a pattern region between the one end and the other end, the pattern region including a plurality of pattern holes and a plurality of ribs between the plurality of pattern holes, wherein a curl value of the mask, which is defined as a shortest distance from a plane tangent to a center of the body to the one end or the other end of the body, is 1,000 μm to 4,000 μm.
-
4.
公开(公告)号:US20230220535A1
公开(公告)日:2023-07-13
申请号:US18122644
申请日:2023-03-16
Applicant: Samsung Display Co, Ltd.
Inventor: Jae Suk MOON , Young Eun RYU , Soo Hyun MIN , Taek Kyo KANG , Min Ju KIM
CPC classification number: C23C14/042 , H10K71/00 , C23C14/24 , C23C14/04 , H10K71/166
Abstract: A mask assembly includes: a mask frame; a mask supported by the mask frame, the mask including a plurality of pattern holes; and a magnetic part disposed on one surface of the mask. The magnetic part provides a magnetic force between the mask and a target substrate and improves an adhesion between the mask and the target substrate to prevent deposition defects.
-
-
-