Abstract:
Provided is an organic light emitting display apparatus. The apparatus may include a substrate including a display region where an image is realized and a non-display region surrounding the display region. The apparatus includes an organic light emitting unit including a first electrode, an intermediate layer, and a second electrode, which are disposed in the display region and are sequentially stacked on the substrate. The apparatus also includes a first inorganic film including a first low temperature viscosity transition (LVT) inorganic material having a first viscosity transition temperature, and covering the organic light emitting unit; and a second inorganic film including a second LVT inorganic material having a second viscosity transition temperature lower than the first viscosity transition temperature, and formed in the non-display region.
Abstract:
A sputtering apparatus, an organic light-emitting display apparatus manufactured using the sputtering apparatus, and a method for manufacturing the organic light-emitting display apparatus are provided. The sputtering apparatus includes: a chamber including a mounting portion configured to hold a deposition target material; a gas supply unit that faces the mounting portion and supplies gas to the chamber; a first target portion and a second target portion that are disposed to face each other within the chamber; and a magnetic field induction coil that surrounds an outside of the chamber.
Abstract:
A thin film deposition apparatus, a deposition method using the same, and a method of manufacturing an organic light-emitting display apparatus by using the apparatus are provided. A thin film deposition apparatus is provided that includes a chamber containing a substrate holder on which a substrate is mounted, a plurality of rotary shaft units that change rotation and an inclination angle of the substrate holder, and a target unit that supplies a thin film material for formation on the substrate.