公开(公告)号：US20160154296A1

公开(公告)日：2016-06-02

申请号：US14814763

申请日：2015-07-31

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sang-Hyun KIM ,  Dong-Wan KIM ,  Chang-Min PARK ,  In-Sung KIM ,  Dong-Gun LEE

IPC: G03F1/24

CPC classification number: G03F1/24

Abstract: A reflective extreme ultraviolet (EUV) mask includes a mask substrate, a reflecting layer on an upper surface of the mask substrate, and an absorbing layer pattern on an upper surface of the reflecting layer, the absorbing layer pattern having an exposing region and a peripheral region, and the absorbing layer pattern including a grating pattern in the peripheral region to reduce reflectivity of light incident on the peripheral region.

Abstract translation: 反射型极紫外（EUV）掩模包括掩模基板，掩模基板的上表面上的反射层和反射层的上表面上的吸收层图案，吸收层图案具有曝光区域和周边 区域，并且吸收层图案包括在周边区域中的光栅图案，以减少入射到周边区域的光的反射率。

公开(公告)号：US20140213054A1

公开(公告)日：2014-07-31

申请号：US14167055

申请日：2014-01-29

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： In-Sung KIM ,  Chang-Min PARK ,  Jeong-Ho YEO

IPC: H01L21/308

CPC classification number: H01L21/0274 ,  G03F7/2022

Abstract: An exposing method includes irradiating a first light having a first energy to a first exposed region of a photoresist film through a first shot region of a mask, and irradiating a second light having a second energy to the first exposed region of the photoresist film through a second shot region of the mask.

Abstract translation: 曝光方法包括：通过掩模的第一射出区域将具有第一能量的第一光照射到光致抗蚀剂膜的第一曝光区域，并且通过光刻胶膜的第一曝光区域将第二能量的第二光照射到光致抗蚀剂膜的第一曝光区域 面罩的第二拍摄区域。

公开(公告)号：US20140111782A1

公开(公告)日：2014-04-24

申请号：US13942854

申请日：2013-07-16

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jin-Hong PARK ,  Jeong-Ho YEO ,  Joo-On PARK ,  Chang-Min PARK

IPC: G03F7/20

CPC classification number: G03F7/70916

Abstract: Provided are a lithography apparatus, a method for lithography and a stage system. The lithography apparatus includes a reticle stage having a reticle, at least one nozzle on at least one surface of the reticle stage and configured to allow shielding gas to flow to a surface of the reticle to form an air curtain, and a gas supply unit configured to supply the nozzle with the shielding gas.

Abstract translation: 提供了一种光刻设备，一种光刻方法和一个舞台系统。 光刻设备包括具有掩模版的标线片台，在标线片台的至少一个表面上的至少一个喷嘴，并且被配置为允许保护气体流到标线片的表面以形成气帘;以及气体供给单元， 以向喷嘴供应保护气体。