公开(公告)号：US20230125628A1

公开(公告)日：2023-04-27

申请号：US18047820

申请日：2022-10-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Shinji UEYAMA ,  Ingi KIM ,  Harutaka SEKIYA ,  Tomoki ONISHI

IPC: G11C11/16 ,  G01R33/12

Abstract: To reduce a measurement time, an inspection device includes a stage configured to fix a magnetoresistive random access memory (MRAM) to a stage surface and moving the MRAM, a plurality of magnets configured to generate a gradient magnetic, a plurality of line sensors comprising a first line sensor for detecting a magneto-optical effect at a first location of the MRAM and a second line sensor for detecting the magneto-optical effect at a second location that is different from the first location by moving a location of the MRAM within the gradient magnetic field, and an information processor configured to process the magneto-optical effect detected by the plurality of line sensors. Thus, throughput may be improved.

公开(公告)号：US20220137160A1

公开(公告)日：2022-05-05

申请号：US17467967

申请日：2021-09-07

Applicant: Samsung Electronics Co., Ltd.

Inventor： Harutaka SEKIYA ,  Shinji UEYAMA ,  Tomoki ONISHI

IPC: G01R33/032 ,  G01R33/00

Abstract: The inventive concepts provide a magnetic property measurement apparatus capable of quickly measuring a magnetic property of a subject without a decrease in a measurement speed that might occur due to an electromagnet. In addition, the inventive concepts provide a magnetic property measurement apparatus capable of monitoring a magnetization distribution of a memory device as an image and integrating images by using a TDI camera, thereby being capable of performing highly sensitive measurement and not having to capture images for a long time. The magnetic property measurement apparatus includes: a magnetic field generation unit configured to generate a magnetic field which is constant with time and varies with relative position; a mobile unit configured to move a subject to be measured in the magnetic field; and a measurement unit configured to measure a magnetic property of the subject moving in the magnetic field.

公开(公告)号：US20170108329A1

公开(公告)日：2017-04-20

申请号：US15206613

申请日：2016-07-11

Applicant: Samsung Electronics Co., Ltd.

Inventor： KWANG-SOO KIM ,  Harutaka SEKIYA ,  Kwang-jun YOON ,  Sung-won PARK ,  Young-duk KIM ,  Heon-ju SHIN ,  Byeong-hwan JEON

IPC: G01B11/00 ,  G01N21/01 ,  G01N21/956 ,  H01L21/68 ,  G01N21/95

CPC classification number: G01B11/002 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/121 ,  H01L21/681

Abstract: An automatic focus control apparatus includes a light detector, which receives light reflected by a surface of a wafer and generates a light reception signal based on the received signal, a controller, which generates a driving signal, the driving signal being one of a first signal and a second signal, the driving signal indicating whether to perform automatic focus control based on the light reception signal, a focus error corrector, which generates a focus error correction signal based on the driving signal, and a stage driver, which displaces a wafer stage supporting the wafer by adjusting the z-axis position of the wafer stage based on the focus error correcting signal if the driving signal is the first signal, and maintains the z-axis position of the wafer stage based on the focus error correction signal if the driving signal is the second signal.