公开(公告)号：US20240309298A1

公开(公告)日：2024-09-19

申请号：US18413777

申请日：2024-01-16

Applicant: Samsung Electronics Co., Ltd.

Inventor： Minhyung CHO ,  Minju IM ,  Hyojoong YOON ,  Mihyun PARK ,  Jinhye BAE ,  Taekyung LEE ,  Sangwon BAE

IPC: C11D3/20 ,  C11D3/30 ,  C11D3/39 ,  G03F7/42 ,  H01L21/02

CPC classification number: C11D3/201 ,  C11D3/2017 ,  C11D3/2068 ,  C11D3/30 ,  C11D3/3927 ,  G03F7/425 ,  H01L21/02071 ,  C11D2111/22

Abstract: A stripper composition may include a polar organic solvent, a pH-adjusting agent, and an ammonium salt or a diamine compound, and deionized water (DIW). In the diamine compound, a main chain between amines may have 4 or fewer carbon atoms.