公开(公告)号：US20170213710A1

公开(公告)日：2017-07-27

申请号：US15260910

申请日：2016-09-09

Applicant: Samsung Electronics Co., Ltd.

Inventor： Protopopov VLADIMIR ,  Ki Ho HWANG ,  Doug Yong SUNG ,  Se Jin OH ,  Kul INN ,  Sung Ho JANG ,  Yun Kwang JEON

IPC: H01J37/32 ,  H04N5/335 ,  G06T7/00

CPC classification number: H01J37/32935 ,  H01J37/32715 ,  H01J37/32972 ,  H04N5/2252

Abstract: An apparatus for monitoring an interior of a process chamber including a process chamber including a chamber body and a view port defined in the chamber body, a cover section including a pinhole in one end, the cover section disposed to correspond to an end portion of the view port, the cover section having a first length in a direction toward a center point of the process chamber, and a sensing unit inserted into the view port to monitor the interior of the process chamber through the pinhole, a region in the process chamber to be sensed by the sensing unit determined based on the first length may be provided.

公开(公告)号：US20190164731A1

公开(公告)日：2019-05-30

申请号：US16262024

申请日：2019-01-30

Applicant: Samsung Electronics Co., Ltd.

Inventor： Protopopov VLADIMIR ,  Ki Ho HWANG ,  Doug Yong SUNG ,  Se Jin OH ,  Kul INN ,  Sung Ho JANG ,  Yun Kwang JEON

IPC: H01J37/32 ,  H04N5/225

Abstract: An apparatus for monitoring an interior of a process chamber including a process chamber including a chamber body and a view port defined in the chamber body, a cover section including a pinhole in one end, the cover section disposed to correspond to an end portion of the view port, the cover section having a first length in a direction toward a center point of the process chamber, and a sensing unit inserted into the view port to monitor the interior of the process chamber through the pinhole, a region in the process chamber to be sensed by the sensing unit determined based on the first length may be provided.