公开(公告)号：US20180356349A1

公开(公告)日：2018-12-13

申请号：US15867070

申请日：2018-01-10

Applicant: Samsung Electronics Co., Ltd.

Inventor： Min Ho Rim ,  YU SIN YANG ,  CHUNG SAM JUN ,  YUN JUNG JEE

IPC: G01N21/95 ,  H01L21/66 ,  H01L21/67

CPC classification number: G01N21/9501 ,  H01L21/67288 ,  H01L22/12

Abstract: A method of testing can include providing a first beam having a first focal length and a second beam having a second focal length that is less than the first focal length to a stage region to provide a first reflected beam and a second reflected beam from the stage region. The first reflected beam can be detected among the first reflected beam and the second reflected beam reflected from the stage region. The second reflected beam can be detected among the first reflected beam and the second reflected beam reflected from the stage region. A first image can be generated from the first reflected beam and a second image can be generated from the second reflected beam. The first image and the second image can be combined to provide a 3D image.

公开(公告)号：US20240219314A1

公开(公告)日：2024-07-04

申请号：US18469107

申请日：2023-09-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Min Ho Rim ,  Young Hoon Sohn

IPC: G01N21/95 ,  H01L21/66

CPC classification number: G01N21/9501 ,  H01L22/12

Abstract: A method for manufacturing a semiconductor device includes generating light, modulating power of the light to generate power-modulated light, acquiring an image signal of a measurement target using the power-modulated light, filtering the image signal to separate a real signal and a false signal, analyzing the measurement target using the real signal, and performing a semiconductor process on the measurement target based analyzing the measurement target using the real signal, wherein filtering the image signal includes classifying a first component of the image signal that is dependent on power of the power-modulated light as the real signal, and classifying a second component of the image signal that is independent of the power of the power-modulated light as the false signal.

公开(公告)号：US10281410B2

公开(公告)日：2019-05-07

申请号：US15867070

申请日：2018-01-10

Applicant: Samsung Electronics Co., Ltd.

Inventor： Min Ho Rim ,  Yu Sin Yang ,  Chung Sam Jun ,  Yun Jung Jee

IPC: G01N21/95 ,  H01L21/67 ,  H01L21/66

Abstract: A method of testing can include providing a first beam having a first focal length and a second beam having a second focal length that is less than the first focal length to a stage region to provide a first reflected beam and a second reflected beam from the stage region. The first reflected beam can be detected among the first reflected beam and the second reflected beam reflected from the stage region. The second reflected beam can be detected among the first reflected beam and the second reflected beam reflected from the stage region. A first image can be generated from the first reflected beam and a second image can be generated from the second reflected beam. The first image and the second image can be combined to provide a 3D image.