公开(公告)号：US20180144765A1

公开(公告)日：2018-05-24

申请号：US15864480

申请日：2018-01-08

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Martin Blaber ,  Tong Zhao ,  Michael C. Kautzky ,  Justin Brons ,  John C. Duda ,  Yuhang Cheng ,  Michael A. Seigler

IPC: G11B5/31 ,  G11B5/00

CPC classification number: G11B5/314 ,  G11B5/3116 ,  G11B5/3133 ,  G11B2005/0021

Abstract: Devices that have an air bearing surface (ABS), the device includes a near field transducer (NFT) that includes a disc configured to convert photons incident thereon into plasmons; and a peg configured to couple plasmons coupled from the disc into an adjacent magnetic storage medium, wherein the disc includes a disc material that includes gold or an alloy thereof and the peg includes a peg material, wherein the disc material is different from the peg material and wherein the peg material has a real part of the permittivity that is not greater than that of gold.

公开(公告)号：US20180075872A1

公开(公告)日：2018-03-15

申请号：US15817511

申请日：2017-11-20

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Martin Blaber ,  Jie Gong ,  Dimitar Dimitrov ,  Steve Riemer ,  Michael Kautzky ,  Tong Zhao ,  Yongjun Zhao

IPC: G11B5/60 ,  G11B5/31 ,  G11B5/00

CPC classification number: G11B5/6088 ,  G11B5/314 ,  G11B5/3163 ,  G11B2005/0021

Abstract: Devices having an air bearing surfaces (ABS), the devices including a near field transducer (NFT) that includes a disc having a front edge; a peg, the peg having a front surface at the air bearing surface of the apparatus, an opposing back surface, a top surface that extends from the front surface to the back surface, two side surfaces that expend from the front surface to the back surface and a bottom surface that extends from the front surface to the back surface; and a barrier layer, the barrier layer separating at least the back surface of the peg from the disc and the barrier layer having a thickness from 10 nm to 50 nm.

公开(公告)号：US20170316793A1

公开(公告)日：2017-11-02

申请号：US15613393

申请日：2017-06-05

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Martin Blaber ,  Tong Zhao ,  Justin Brons ,  Michael Kautzky

IPC: G11B5/31 ,  G11B5/60 ,  G11B5/00

CPC classification number: G11B5/314 ,  G11B5/3163 ,  G11B5/6082 ,  G11B5/6088 ,  G11B2005/0021

Abstract: Devices having air bearing surfaces (ABS), the devices including a near field transducer (NFT) that includes a disc configured to convert photons incident thereon into plasmons; and a peg configured to couple plasmons coupled from the disc into an adjacent magnetic storage medium, wherein at least one of a portion of the peg, a portion of the disc, or a portion of both the peg and the disc include a multilayer structure including at least two layers including at least one layer of a first material and at least one layer of a second material, wherein the first material and the second material are not the same and wherein the first and the second materials independently include aluminum (Al), antimony (Sb), bismuth (Bi), boron (B), barium (Ba), calcium (Ca), cerium (Ce), chromium (Cr), cobalt (Co), copper (Cu), erbium (Er), gadolinium (Gd), gallium (Ga), germanium (Ge), gold (Au), hafnium (Hf), indium (In), iridium (Ir), iron (Fe), lanthanum (La), magnesium (Mg), manganese (Mn), molybdenum (Mo), nickel (Ni), niobium (Nb), osmium (Os), palladium (Pd), platinum (Pt), rhenium (Re), rhodium (Rh), ruthenium (Ru), scandium (Sc), silicon (Si), silver (Ag), strontium (Sr), tantalum (Ta), thorium (Th), tin (Sn), titanium (Ti), vanadium (V), tungsten (W), ytterbium (Yb), yttrium (Y), zirconium (Zr), or combinations thereof.

公开(公告)号：US09620152B2

公开(公告)日：2017-04-11

申请号：US15167622

申请日：2016-05-27

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Michael C. Kautzky ,  Mark H. Ostrowski ,  David Michael Grundman ,  Martin Blaber

IPC: G11B5/33 ,  G11B11/00 ,  G11B5/31 ,  G11B5/00

CPC classification number: G11B5/3169 ,  G11B5/3109 ,  G11B5/3133 ,  G11B5/314 ,  G11B5/3163 ,  G11B5/6088 ,  G11B2005/0021

Abstract: Methods of forming a NFT the methods including forming a hard mask positioned over at least a portion of the rod, the hard mask including at least one layer; patterning a resist mask over the hard mask, the resist mask having an edge positioned over at least a portion of the rod; etching a portion of the hard mask to expose a back edge of the rod and to form a back edge of the hard mask, wherein the back edge of the rod is equivalent to the back edge of the peg; and wherein a forward portion of the rod which is the portion of the rod forward of the back edge is covered by the hard mask; forming a disc mask including a void configured to form a disc of a NFT, the disc mask being formed over at least a portion of the hard mask so that the exposed back edge of the rod is within the void configured to form the disc; etching an area exposed in the void of the disc mask to remove both a rear portion of the rod and the surrounding dielectric up to the back edge of the hard mask edge; depositing a disc material in the etched void, wherein the back edge of the hard mask defines the front edge of the disc and the back edge of the rod is in contact with the front edge of the disc; and polishing the deposited disc material to form a top surface substantially planar with the top of the forward rod portion.

公开(公告)号：US20160275979A1

公开(公告)日：2016-09-22

申请号：US15060914

申请日：2016-03-04

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Sarbeswar Sahoo ,  Martin Blaber ,  Hui Brickner ,  Tong Zhao ,  Yuhang Cheng ,  John Duda ,  Tae-Woo Lee

IPC: G11B5/60 ,  G11B5/31

CPC classification number: G11B5/314 ,  G11B5/6088 ,  G11B2005/0021

Abstract: Devices having an air bearing surface (ABS), the devices including a write pole; a near field transducer (NFT) that includes a peg and a disc, wherein the peg is at the ABS of the device; a heat sink positioned adjacent the disc of the NFT; a dielectric gap positioned adjacent the peg of the NFT at the ABS of the device; and a conformal diffusion barrier layer positioned between the write pole and the dielectric gap, the disc, and the heat sink, wherein the conformal diffusion barrier layer forms at least one angle that is not greater than 135°.

Abstract translation: 具有空气轴承表面（ABS）的装置，该装置包括一个写柱; 包括钉和盘的近场换能器（NFT），其中所述栓在所述装置的ABS处; 靠近NFT盘的散热片; 位于设备的ABS处的与NFT的钉相邻的电介质间隙; 以及位于写极和电介质间隙之间的适形扩散阻挡层，盘和散热器，其中，共形扩散阻挡层形成至少一个不大于135°的角度。

公开(公告)号：US11348613B2

公开(公告)日：2022-05-31

申请号：US16240510

申请日：2019-01-04

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Paul M. Jones ,  Hongbo Wang ,  Martin Blaber ,  Huan Tang

IPC: G11B5/72 ,  C23C14/08 ,  C23C14/06 ,  C23C14/34 ,  H01J37/34 ,  G11B5/84 ,  G11B5/00

Abstract: Systems and methods for adding a cap-layer to magnetic recording media are described. In one embodiment, the method may include depositing a magnetic recording layer over a substrate, depositing an interface layer over the magnetic recording layer, and depositing a carbon overcoat layer over the interface layer. In some cases, sputter deposition is used to deposit at least the interface layer. In some cases, oxygen is used as a background gas of the sputter deposition.

公开(公告)号：US11107496B2

公开(公告)日：2021-08-31

申请号：US16731526

申请日：2019-12-31

Applicant: Seagate Technology LLC

Inventor： Tong Zhao ,  Martin Blaber ,  Li Wan

IPC: G11B5/31 ,  G11B5/39 ,  G11B5/48 ,  C22C5/04 ,  G11B5/00

Abstract: Heat assisted magnetic recording (HAMR) devices that includes a near field transducer, the near field transducer including alloys of a first element selected from: platinum (Pt), palladium (Pd), rhodium (Rh), iridium (Ir), ruthenium (Ru), and osmium (Os); and a second element selected from; hafnium (Hf), niobium (Nb), tantalum (Ta), titanium (Ti), vanadium (V), and zirconium (Zr).

公开(公告)号：US10229704B2

公开(公告)日：2019-03-12

申请号：US15613393

申请日：2017-06-05

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Martin Blaber ,  Tong Zhao ,  Justin Brons ,  Michael Kautzky

IPC: G11B5/02 ,  G11B11/00 ,  G11B5/31 ,  G11B5/60 ,  G11B5/00

Abstract: Devices having air bearing surfaces (ABS), the devices including a near field transducer (NFT) that includes a disc configured to convert photons incident thereon into plasmons; and a peg configured to couple plasmons coupled from the disc into an adjacent magnetic storage medium, wherein at least one of a portion of the peg, a portion of the disc, or a portion of both the peg and the disc include a multilayer structure including at least two layers including at least one layer of a first material and at least one layer of a second material, wherein the first material and the second material are not the same and wherein the first and the second materials independently include aluminum (Al), antimony (Sb), bismuth (Bi), boron (B), barium (Ba), calcium (Ca), cerium (Ce), chromium (Cr), cobalt (Co), copper (Cu), erbium (Er), gadolinium (Gd), gallium (Ga), germanium (Ge), gold (Au), hafnium (Hf), indium (In), iridium (Ir), iron (Fe), lanthanum (La), magnesium (Mg), manganese (Mn), molybdenum (Mo), nickel (Ni), niobium (Nb), osmium (Os), palladium (Pd), platinum (Pt), rhenium (Re), rhodium (Rh), ruthenium (Ru), scandium (Sc), silicon (Si), silver (Ag), strontium (Sr), tantalum (Ta), thorium (Th), tin (Sn), titanium (Ti), vanadium (V), tungsten (W), ytterbium (Yb), yttrium (Y), zirconium (Zr), or combinations thereof.

公开(公告)号：US20170213571A1

公开(公告)日：2017-07-27

申请号：US15481866

申请日：2017-04-07

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Michael C. Kautzky ,  Mark H. Ostrowski ,  David Michael Grundman ,  Martin Blaber

IPC: G11B5/31 ,  G11B5/60 ,  G11B5/48 ,  G11B5/127

CPC classification number: G11B5/3163 ,  G11B5/1272 ,  G11B5/3133 ,  G11B5/314 ,  G11B5/3169 ,  G11B5/4866 ,  G11B5/6005 ,  G11B5/6088 ,  G11B2005/0021

Abstract: Methods of forming a NFT the methods including forming a hard mask positioned over at least a portion of the rod, the hard mask including at least one layer; patterning a resist mask over the hard mask, the resist mask having an edge positioned over at least a portion of the rod; etching a portion of the hard mask to expose a back edge of the rod and to form a back edge of the hard mask, wherein the back edge of the rod is equivalent to the back edge of the peg; and wherein a forward portion of the rod which is the portion of the rod forward of the back edge is covered by the hard mask; forming a disc mask including a void configured to form a disc of a NFT, the disc mask being formed over at least a portion of the hard mask so that the exposed back edge of the rod is within the void configured to form the disc; etching an area exposed in the void of the disc mask to remove both a rear portion of the rod and the surrounding dielectric up to the back edge of the hard mask edge; depositing a disc material in the etched void, wherein the back edge of the hard mask defines the front edge of the disc and the back edge of the rod is in contact with the front edge of the disc; and polishing the deposited disc material to form a top surface substantially planar with the top of the forward rod portion.

公开(公告)号：US20160351222A1

公开(公告)日：2016-12-01

申请号：US15166799

申请日：2016-05-27

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Martin Blaber ,  Michael A. Seigler ,  Michael C. Kautzky ,  Tong Zhao ,  Justin Brons ,  John C. Duda ,  Yuhang Cheng

IPC: G11B5/60

CPC classification number: G11B5/314 ,  G11B5/3116 ,  G11B5/3133 ,  G11B2005/0021

Abstract: Devices having air bearing surfaces (ABS), the devices include a near field transducer (NFT) that includes a disc configured to convert photons incident thereon into plasmons; and a peg configured to couple plasmons coupled from the disc into an adjacent magnetic storage medium, wherein the disc includes a disc material and the peg includes a peg material, wherein the disc material is different from the peg material and wherein the disc material has a first real part of the permittivity and a peg material has a second real part of the permittivity and the second real part of the permittivity is not greater than the first real part of the permittivity.

Abstract translation: 具有空气轴承表面（ABS）的装置包括近场换能器（NFT），其包括被配置成将入射到其上的光子转换成等离子体的光盘; 以及钉构造成将从所述盘耦合的等离子体光束耦合到相邻的磁存储介质中，其中所述盘包括盘材料，并且所述钉包括钉材料，其中所述盘材料与所述钉材料不同，并且其中所述盘材料具有 介电常数的第一个实部和电极材料具有介电常数的第二个实部，并且介电常数的第二个实部不大于介电常数的第一个实部。