METHODS OF FORMING FILMS
    1.
    发明申请

    公开(公告)号:US20180245213A1

    公开(公告)日:2018-08-30

    申请号:US15964747

    申请日:2018-04-27

    CPC classification number: C23C14/48 C23C14/06 C23C16/26 C23C16/30 C23C16/513

    Abstract: A method of forming a layer, the method including providing a feedstock, the feedstock including a first component and a second component; ionizing at least part of the feedstock thereby forming a plasma, wherein the plasma includes constituents selected from: the first component, derivatives of the first component, ions of the first component, ions of derivatives of the first component, the second component, derivatives of the second component, ions of the second component, ions of derivatives of the second component, or combinations thereof, and wherein the individual identities, individual ratios, total quantities, or any combination thereof of the first and second component in the feedstock can modulate the makeup of the plasma; forming a beam from the plasma; and forming a layer from the beam, wherein the layer includes at least some portion of at least the first or the second component.

    METHODS OF FORMING FILMS
    5.
    发明申请
    METHODS OF FORMING FILMS 审中-公开
    形成薄膜的方法

    公开(公告)号:US20150064365A1

    公开(公告)日:2015-03-05

    申请号:US14013320

    申请日:2013-08-29

    CPC classification number: C23C14/48 C23C14/06 C23C16/26 C23C16/30 C23C16/513

    Abstract: A method of forming a layer, the method including providing a feedstock, the feedstock including a first component and a second component; ionizing at least part of the feedstock thereby forming a plasma, wherein the plasma includes constituents selected from: the first component, derivatives of the first component, ions of the first component, ions of derivatives of the first component, the second component, derivatives of the second component, ions of the second component, ions of derivatives of the second component, or combinations thereof, and wherein the individual identities, individual ratios, total quantities, or any combination thereof of the first and second component in the feedstock can modulate the makeup of the plasma; forming a beam from the plasma; and forming a layer from the beam, wherein the layer includes at least some portion of at least the first or the second component.

    Abstract translation: 一种形成层的方法,所述方法包括提供原料,所述原料包括第一组分和第二组分; 电离原料的至少一部分,从而形成等离子体,其中所述等离子体包括选自以下的成分:第一组分,第一组分的衍生物,第一组分的离子,第一组分的衍生物的离子,第二组分, 第二组分的离子,第二组分的离子,第二组分的衍生物的离子或其组合,并且其中原料中第一组分和第二组分的个体同一性,个体比例,总量或其任何组合可以调节 化妆等离子体; 从等离子体形成光束; 以及从所述梁形成层,其中所述层包括至少第一或第二组分的至少一部分。

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