公开(公告)号：US20180040647A1

公开(公告)日：2018-02-08

申请号：US15666758

申请日：2017-08-02

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Shunpei YAMAZAKI ,  Seiji YASUMOTO ,  Yuka KOBAYASHI ,  Satoru IDOJIRI

IPC: H01L27/12 ,  H01L21/47 ,  H01L27/32 ,  H01L29/786 ,  H01L21/683 ,  H01L21/02 ,  H01L29/66

CPC classification number: H01L27/1266 ,  G02F1/133305 ,  G02F1/133553 ,  G02F1/133603 ,  G02F1/136227 ,  G02F1/1368 ,  G02F2001/133354 ,  G02F2001/13613 ,  G02F2201/44 ,  H01L21/02118 ,  H01L21/02255 ,  H01L21/02282 ,  H01L21/47 ,  H01L21/6835 ,  H01L27/1218 ,  H01L27/1225 ,  H01L27/323 ,  H01L27/3232 ,  H01L27/3262 ,  H01L29/66969 ,  H01L29/7869 ,  H01L2221/6835 ,  H01L2221/68381 ,  H01L2227/323 ,  H01L2227/326

Abstract: To increase the yield of the separation process. To produce display devices formed through the separation process with higher mass productivity. A first layer is formed using a material including a resin or a resin precursor over a substrate. Then, first heat treatment is performed on the first layer, whereby a first resin layer including a residue of an oxydiphthalic acid is formed. Then, a layer to be separated is formed over the first resin layer. Then, the layer to be separated and the substrate are separated from each other. The first heat treatment is performed in an atmosphere containing oxygen.