公开(公告)号：US20140290047A1

公开(公告)日：2014-10-02

申请号：US14306296

申请日：2014-06-17

申请人： TDK Corporation

发明人： Toru Mizuno ,  Osamu Shindo ,  Hitoshi Nakayama

IPC分类号： H05K13/08

CPC分类号： H05K13/08 ,  H01L21/67144 ,  H01L21/6838 ,  H01L24/75 ,  H01L24/81 ,  H01L2224/75702 ,  H01L2224/75745 ,  H01L2224/75753 ,  H01L2224/81191 ,  Y10T29/49131 ,  Y10T29/49769 ,  Y10T29/53022 ,  Y10T29/53091 ,  Y10T29/53174 ,  Y10T29/53178 ,  Y10T29/53191

摘要： A workpiece transfer apparatus comprises a nozzle unit and an imaging unit wherein the nozzle unit includes a cylindrical body, a suction hole opening at one end of the tuber body and an end face member of a transparent body sealing the other end of the tuber body. The suction hole can make the imaging unit capable of taking images of first patterns for positioning on an upper surface (suctioned surface) of a workpiece, and the size and shape of the suction hole fits within an outline of the upper surface of the workpiece. The end face member of the transparent body both enable to maintain negative pressure of inside of the cylindrical body and to permit optical penetration for the imaging unit. The imaging unit takes the image of the first pattern for positioning of the workpiece while the imaging unit views a suctioned surface of the workpiece through the transparent body and the suction hole.

摘要翻译： 工件传送装置包括喷嘴单元和成像单元，其中喷嘴单元包括圆柱体，在块茎体的一端开口的吸孔和密封块体的另一端的透明体的端面构件。 抽吸孔可以使成像单元能够拍摄第一图案的图像，以便在工件的上表面（抽吸表面）上定位，并且吸孔的尺寸和形状配合在工件的上表面的轮廓内。 透明体的端面构件能够保持筒体内部的负压并允许成像单元的光学穿透。 成像单元拍摄用于定位工件的第一图案的图像，同时成像单元通过透明体和吸孔观察工件的吸入表面。

公开(公告)号：US09374936B2

公开(公告)日：2016-06-21

申请号：US14306296

申请日：2014-06-17

申请人： TDK Corporation

发明人： Toru Mizuno ,  Osamu Shindo ,  Hitoshi Nakayama

IPC分类号： H01L21/60 ,  H05K13/08 ,  H01L21/683 ,  H01L23/00 ,  H01L21/67

CPC分类号： H05K13/08 ,  H01L21/67144 ,  H01L21/6838 ,  H01L24/75 ,  H01L24/81 ,  H01L2224/75702 ,  H01L2224/75745 ,  H01L2224/75753 ,  H01L2224/81191 ,  Y10T29/49131 ,  Y10T29/49769 ,  Y10T29/53022 ,  Y10T29/53091 ,  Y10T29/53174 ,  Y10T29/53178 ,  Y10T29/53191

摘要： A workpiece mounting apparatus includes a transfer apparatus having a nozzle, a first imaging unit, and an image processor. The nozzle has opposed first and second ends, a suction hole at the first end, and a transparent end face member sealing the second end. The first imaging unit captures a first pattern for positioning a workpiece. The image processor identifies a reference position of the workpiece based on the first pattern captured. The workpiece mounting apparatus also includes a substrate support supporting a substrate with a second pattern for positioning, a second imaging unit for capturing the second pattern, and a positioning unit for controlling position of the nozzle. The image processor identifies a mounting target position on the substrate, based on the second pattern capture, and the positioning unit controls the nozzle to mount the workpiece on the substrate, when the reference position coincides with the mounting target position.

摘要翻译： 工件安装装置包括具有喷嘴，第一成像单元和图像处理器的传送装置。 喷嘴具有相对的第一端和第二端，在第一端处具有抽吸孔，以及密封第二端的透明端面构件。 第一成像单元捕获用于定位工件的第一图案。 图像处理器基于所捕获的第一图案来识别工件的基准位置。 工件安装装置还包括支撑具有用于定位的第二图案的基板的基板支撑件，用于捕获第二图案的第二成像单元和用于控制喷嘴位置的定位单元。 图像处理器基于第二图案捕获来识别基板上的安装目标位置，并且当基准位置与安装目标位置一致时，定位单元控制喷嘴将工件安装在基板上。