SCULPTED MICROMIRROR IN A DIGITAL MICROMIRROR DEVICE

    公开(公告)号:US20210382296A1

    公开(公告)日:2021-12-09

    申请号:US17111309

    申请日:2020-12-03

    Abstract: A digital micromirror device comprises an array of micromirror pixels, the array comprising a first micromirror pixel and a second micromirror pixel. The first micromirror pixel comprises a hinge, where the hinge is configured to tilt toward a first raised address electrode and toward a second raised address electrode. The first micromirror pixel also comprises a first micromirror coupled to the hinge, where the first micromirror has a sculpted edge. The second micromirror pixel comprises a second micromirror, where a first gap between a first point on the sculpted edge and a nearest point to the first point on the second micromirror is larger than a second gap between a second point on the sculpted edge and a nearest point to the second point on the second micromirror.

    FRINGING-FIELD, PARALLEL PLATE ACTUATOR

    公开(公告)号:US20250035919A1

    公开(公告)日:2025-01-30

    申请号:US18908271

    申请日:2024-10-07

    Abstract: A microelectromechanical systems (MEMS) device includes a base plate including a first electrode and a second electrode and a top layer. The MEMS device also includes a perforated hinge plate supporting the top layer. The perforated hinge plate includes first and second flexural arms permitting the perforated hinge plate and the top layer to move relative to the base plate. The perforated hinge plate has a first perforation that includes the first electrode and has a footprint that is larger than a footprint of the first electrode, and the perforated hinge plate has a second perforation that includes the second electrode and has a footprint that is larger than a footprint of the second electrode. Additionally, the MEMS device includes a first support post to which the first flexural arm is connected and a second support post to which the second flexural arm is connected.

    FRINGING-FIELD, PARALLEL PLATE ACTUATOR

    公开(公告)号:US20210215928A1

    公开(公告)日:2021-07-15

    申请号:US17114369

    申请日:2020-12-07

    Abstract: A phase light modulator includes a base plate, a mirror, a perforated hinge plate, and first second support posts. The perforated hinge plate supports the mirror. The perforated hinge plate has first and second flexural arms. The perforated hinge plate is configured to move toward or away from the base plate based on application of a potential difference between the base plate and the perforated hinge plate. The first flexural arm is connected to the first support posts, and the second flexural arm is connected to the second support post.

    MICROELECTROMECHANICAL SYSTEMS CONTACT AREA REDUCTION

    公开(公告)号:US20230078156A1

    公开(公告)日:2023-03-16

    申请号:US17472947

    申请日:2021-09-13

    Abstract: In an example, a system includes a digital micromirror device (DMD). The DMD includes a hinge and one or more spring tips coupled to the hinge, where the hinge is configured to tilt toward a raised address electrode. The DMD includes a micromirror including a recessed mirror shelf and a reflective surface, where the recessed mirror shelf is coupled to the hinge, and where the recessed mirror shelf is configured to contact at least one of the one or more spring tips responsive to the hinge tilting toward the raised address electrode.

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