公开(公告)号：US20230127477A1

公开(公告)日：2023-04-27

申请号：US17728844

申请日：2022-04-25

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Christopher Murray BEARD ,  Song ZHENG ,  John Wesley HAMLIN, III ,  Win-Jae Jessie YUAN ,  Kelly Jay TAYLOR ,  Jose Antonio MARTINEZ SOTO

IPC: B81C1/00

Abstract: In an example, a method includes depositing an organic polymer layer on one or more material layers. The method also includes thermally curing the organic polymer layer. The method includes depositing a hard mask on the organic polymer layer and depositing a photoresist layer on the hard mask. The method also includes patterning the photoresist layer to expose at least a portion of the hard mask. The method includes etching the exposed portion of the hard mask to expose at least a portion of the organic polymer layer. The method also includes etching the exposed portion of the organic polymer layer to expose at least a portion of the one or more material layers.

公开(公告)号：US20220269067A1

公开(公告)日：2022-08-25

申请号：US17398907

申请日：2021-08-10

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： William Craig McDONALD ,  James Norman HALL ,  Kelly Jay TAYLOR ,  Song ZHENG

IPC: G02B26/08 ,  H02N1/00

Abstract: A system includes a hinge structure. The hinge structure includes four support posts and four hinges, each hinge coupled to an edge of a support post and to a plate of the hinge structure, where each hinge includes two 90° turns. The system also includes a mirror coupled to the hinge structure and an electrode structure coupled to the hinge structure.