公开(公告)号：US10012980B2

公开(公告)日：2018-07-03

申请号：US14303059

申请日：2014-06-12

申请人： TOKYO ELECTRON LIMITED

发明人： Taku Mizutani ,  Ichiro Namioka ,  Toshihiko Iijima ,  Shigenori Todate

IPC分类号： G05B19/41 ,  H01L21/67 ,  G05B19/418 ,  H01L21/677

CPC分类号： G05B19/4189 ,  G05B2219/31277 ,  G05B2219/32271 ,  G05B2219/45031 ,  H01L21/67276 ,  H01L21/67727 ,  Y02P80/114 ,  Y02P90/20 ,  Y02P90/28

摘要： There is provided a production processing system including: a production efficiency improvement device configured to select a processing apparatus that processes workpieces in consideration of a position of each of a plurality of processing apparatuses arranged along a transfer path; and a transfer control device configured to move a transfer apparatus that transfers workpieces from a predetermined position on the transfer path to the selected processing apparatus.

公开(公告)号：US10108162B2

公开(公告)日：2018-10-23

申请号：US14284916

申请日：2014-05-22

申请人： TOKYO ELECTRON LIMITED

发明人： Taku Mizutani ,  Ichiro Namioka ,  Toshihiko Iijima ,  Shigenori Todate ,  Takahiro Ito

IPC分类号： G05B19/042 ,  G05B19/418 ,  H01L21/67

摘要： A manufacturing process system includes: a plurality of processing devices which processes workpieces, with respective equipment associated with the plurality of processing devices; a transfer device which transfers the workpieces to the plurality of processing devices; a host computer which performs creating a transfer plan including information of timings at which the workpieces are carried in and out by the transfer device and acquiring an operation schedule including information of maintenance time from the plurality of processing devices; and a processing device group controller which performs acquiring the transfer plan and the operation schedule from the host computer, comparing the transfer plan and the operation schedule of each processing device, specifying the last process before maintenance for each processing device, detecting the end timing of the specified process, and instructing each processing device to be switched to an idle state at the end timing along with the associated equipment.

公开(公告)号：US20150084772A1

公开(公告)日：2015-03-26

申请号：US14387668

申请日：2013-03-14

申请人： TOKYO ELECTRON LIMITED

发明人： Ichiro Namioka

IPC分类号： G08B21/18

CPC分类号： G08B21/18 ,  H01L21/67288

摘要： Disclosed is a failure monitoring system for monitoring a failure of a substrate processing apparatus that performs a predetermined processing on a substrate to be processed, the failure monitoring system including: an alarm collecting unit configured to collects alarms issued from the substrate processing apparatus; and an analyzing unit configured to analyze the alarms collected by the alarm collecting unit and display, as an image, an alarm issuing frequency in each monitoring period on a two-dimensional space, of which one axis represents an alarm ID that specifies an alarm issuing area and another axis represents a predetermined monitor period.

摘要翻译： 本发明公开了一种故障监视系统，用于监视对要处理的基板执行预定处理的基板处理装置的故障，所述故障监视系统包括：报警收集单元，其被配置为收集从所述基板处理装置发出的报警; 以及分析单元，被配置为分析由所述报警收集单元收集的报警，并且在二维空间中的每个监视周期中显示作为图像的报警发出频率，其中一个轴表示指定报警发出的报警ID 区域，另一个轴表示预定的监视周期。

公开(公告)号：US09412256B2

公开(公告)日：2016-08-09

申请号：US14387668

申请日：2013-03-14

申请人： TOKYO ELECTRON LIMITED

发明人： Ichiro Namioka

IPC分类号： G08B21/00 ,  G08B21/18 ,  H01L21/67

CPC分类号： G08B21/18 ,  H01L21/67288

摘要： Disclosed is a failure monitoring system for monitoring a failure of a substrate processing apparatus that performs a predetermined processing on a substrate to be processed, the failure monitoring system including: an alarm collecting unit configured to collects alarms issued from the substrate processing apparatus; and an analyzing unit configured to analyze the alarms collected by the alarm collecting unit and display, as an image, an alarm issuing frequency in each monitoring period on a two-dimensional space, of which one axis represents an alarm ID that specifies an alarm issuing area and another axis represents a predetermined monitor period.

摘要翻译： 本发明公开了一种故障监视系统，用于监视对要处理的基板执行预定处理的基板处理装置的故障，所述故障监视系统包括：报警收集单元，其被配置为收集从所述基板处理装置发出的报警; 以及分析单元，被配置为分析由所述报警收集单元收集的报警，并且在二维空间中的每个监视周期中显示作为图像的报警发出频率，其中一个轴表示指定报警发出的报警ID 区域，另一个轴表示预定的监视周期。

公开(公告)号：US20150032246A1

公开(公告)日：2015-01-29

申请号：US14481010

申请日：2014-09-09

申请人： TOKYO ELECTRON LIMITED

发明人： Taku Mizutani ,  Ichiro Namioka ,  Kazushi Mori

IPC分类号： H01L21/02

CPC分类号： H01L21/02002 ,  H01L21/67288

摘要： An energy-consumption monitoring system for a substrate processing apparatus includes a data collection device which collects process implementation data of a process to be executed according to each recipe in a substrate processing apparatus, a memory device which stores energy consumption data that indicate relationship between an individual energy-consuming event in the process and an amount of energy consumed per unit time by the individual energy-consuming event, and a computation device which detects an occurrence of the individual energy-consuming event and virtually calculate a cumulative energy consumption based on a duration of the individual energy-consuming event and the energy consumption data of the individual energy-consuming event stored in the memory device.

摘要翻译： 用于基板处理装置的能量消耗监测系统包括：数据收集装置，其收集基板处理装置中根据每个配方执行的处理的处理实现数据;存储装置，其存储表示 该过程中的单独的能量消耗事件和单个能耗事件的每单位时间消耗的能量的量，以及检测个体能量消耗事件的发生的计算装置，并且基于 单个耗能事件的持续时间和存储在存储装置中的各个能耗事件的能量消耗数据。