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公开(公告)号：US10012980B2
公开(公告)日：2018-07-03
申请号：US14303059
申请日：2014-06-12
IPC分类号： G05B19/41 , H01L21/67 , G05B19/418 , H01L21/677
CPC分类号： G05B19/4189 , G05B2219/31277 , G05B2219/32271 , G05B2219/45031 , H01L21/67276 , H01L21/67727 , Y02P80/114 , Y02P90/20 , Y02P90/28
摘要： There is provided a production processing system including: a production efficiency improvement device configured to select a processing apparatus that processes workpieces in consideration of a position of each of a plurality of processing apparatuses arranged along a transfer path; and a transfer control device configured to move a transfer apparatus that transfers workpieces from a predetermined position on the transfer path to the selected processing apparatus.
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公开(公告)号：US10108162B2
公开(公告)日：2018-10-23
申请号：US14284916
申请日：2014-05-22
IPC分类号： G05B19/042 , G05B19/418 , H01L21/67
摘要： A manufacturing process system includes: a plurality of processing devices which processes workpieces, with respective equipment associated with the plurality of processing devices; a transfer device which transfers the workpieces to the plurality of processing devices; a host computer which performs creating a transfer plan including information of timings at which the workpieces are carried in and out by the transfer device and acquiring an operation schedule including information of maintenance time from the plurality of processing devices; and a processing device group controller which performs acquiring the transfer plan and the operation schedule from the host computer, comparing the transfer plan and the operation schedule of each processing device, specifying the last process before maintenance for each processing device, detecting the end timing of the specified process, and instructing each processing device to be switched to an idle state at the end timing along with the associated equipment.
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