公开(公告)号：US09696340B2

公开(公告)日：2017-07-04

申请号：US15048763

申请日：2016-02-19

申请人： The Regents of the University of California

发明人： Alexander A. Trusov ,  Sergei A. Zotov ,  Andrei M. Shkel

IPC分类号： G01P15/097 ,  G01P21/00 ,  G01P15/125 ,  G01P15/18 ,  G01C19/5783

CPC分类号： G01P21/00 ,  G01C19/5783 ,  G01P15/097 ,  G01P15/125 ,  G01P15/18

摘要： A multi-axis microelectromechanical-systems (MEMS) inertial measurement unit (IMU) is fabricated in a vacuum sealed single packaged device. An FM vibratory gyroscope and an FM resonant accelerometer both for generating FM output signals is fabricated in the silicon chip using MEMS. A signal processor is coupled to the an FM vibratory gyroscope and to the FM resonant accelerometer for receiving the FM gyroscopic output signals and the FM accelerometer output signals. The signal processor generates simultaneous and decoupled measurement of input acceleration, input rotation rate, and temperature and/or temperature distribution within the IMU, self-calibration of the biases and scale factors of the IMU and its support electronics against temperature variations and other common mode errors, and reduction of the cross axis sensitivity by reducing acceleration errors in the gyroscope and rotation errors in the accelerometer.

公开(公告)号：US20160084654A1

公开(公告)日：2016-03-24

申请号：US14863172

申请日：2015-09-23

申请人： The Regents of the University of California

发明人： Doruk Senkal ,  Sergei A. Zotov ,  Andrei M. Shkel

IPC分类号： G01C19/5747 ,  G01C19/5726

CPC分类号： G01C19/5747 ,  G01C19/5726

摘要： The improvement includes an outer proof mass having a corresponding center of mass; and an inner proof mass having a corresponding center of mass, where the corresponding centers of mass of the outer proof mass and the inner proof mass are approximately co-located. Thus, a double Foucault pendulum is essentially provided in a micromachined gyroscope.

摘要翻译： 该改进包括具有相应质心的外部检验质量块; 以及具有对应质心的内部检验质量块，其中外部质量块和内部质量质量的相应质心大致相同。 因此，基本上在微加工陀螺仪中提供了双重福柯摆。

公开(公告)号：US20130214461A1

公开(公告)日：2013-08-22

申请号：US13847624

申请日：2013-03-20

申请人： The Regents of the University of California

发明人： Andrei M. Shkel ,  Alexander A. Trusov ,  Igor P. Prikhodko ,  Sergei A. Zotov

IPC分类号： B29C44/02

CPC分类号： G01C19/56 ,  B29C44/02 ,  B29C44/022 ,  G01C19/5691

摘要： A vibratory sensor is fabricated as a three-dimensional batch-micromachined shell adapted to vibrate and support elastic wave propagation and wave precession in the shell or membrane and at least one driving electrode and preferably a plurality of driving electrodes directly or indirectly coupled to the shell to excite and sustain the elastic waves in the shell. The pattern of elastic waves is determined by the configuration of the driving electrode(s). At least one sensing electrode and preferably a plurality of sensing electrodes are provided to detect the precession of the elastic wave pattern in the shell. The rotation of the shell induces precession of the elastic wave pattern in the shell which is usable to measure the rotation angle or rate of the vibratory sensor.

摘要翻译： 制造振动传感器作为三维批量微机械加工的壳体，其适于振动并支撑壳体或膜中的弹性波传播和波形进动，以及至少一个驱动电极，优选地多个驱动电极直接或间接耦合到壳体 激发和维持壳中的弹性波。 弹性波的图案由驱动电极的结构决定。 提供至少一个感测电极和优选地多个感测电极以检测壳体中的弹性波形图案的进动。 壳体的旋转引起壳体中的弹性波纹的进动，其可用于测量振动传感器的旋转角度或速率。

公开(公告)号：US20160169935A1

公开(公告)日：2016-06-16

申请号：US15048763

申请日：2016-02-19

申请人： The Regents of the University of California

发明人： Alexander A. Trusov ,  Sergei A. Zotov ,  Andrei M. Shkel

IPC分类号： G01P21/00

CPC分类号： G01P21/00 ,  G01C19/5783 ,  G01P15/097 ,  G01P15/125 ,  G01P15/18

摘要： A multi-axis microelectromechanical-systems (MEMS) inertial measurement unit (IMU) is fabricated in a vacuum sealed single packaged device. An FM vibratory gyroscope and an FM resonant accelerometer both for generating FM output signals is fabricated in the silicon chip using MEMS. A signal processor is coupled to the an FM vibratory gyroscope and to the FM resonant accelerometer for receiving the FM gyroscopic output signals and the FM accelerometer output signals. The signal processor generates simultaneous and decoupled measurement of input acceleration, input rotation rate, and temperature and/or temperature distribution within the IMU, self-calibration of the biases and scale factors of the IMU and its support electronics against temperature variations and other common mode errors, and reduction of the cross axis sensitivity by reducing acceleration errors in the gyroscope and rotation errors in the accelerometer.

摘要翻译： 在真空密封的单一封装装置中制造多轴微机电系统（MEMS）惯性测量单元（IMU）。 用于产生FM输出信号的FM振动陀螺仪和FM谐振加速度计使用MEMS制造在硅芯片中。 信号处理器耦合到FM振动陀螺仪和FM谐振加速度计，用于接收FM陀螺仪输出信号和FM加速度计输出信号。 信号处理器产生输入加速度，输入旋转速率以及IMU内的温度和/或温度分布的同时和去耦测量，对IMU及其支持电子器件的温度变化和其他共模的偏差和比例因子进行自校准 误差，减少陀螺仪中的加速度误差和加速度计中的旋转误差来降低交叉轴灵敏度。

公开(公告)号：US09274136B2

公开(公告)日：2016-03-01

申请号：US13752044

申请日：2013-01-28

申请人： The Regents of the University of California

发明人： Alexander A. Trusov ,  Sergei A. Zotov ,  Andrei M. Shkel

IPC分类号： G01P15/097 ,  G01P21/00 ,  G01P15/125 ,  G01P15/18 ,  G01C19/5783

CPC分类号： G01P21/00 ,  G01C19/5783 ,  G01P15/097 ,  G01P15/125 ,  G01P15/18

摘要： A multi-axis microelectromechanical-systems (MEMS) inertial measurement unit (IMU) is fabricated in a vacuum sealed single packaged device. An FM vibratory gyroscope and an FM resonant accelerometer both for generating FM output signals is fabricated in the silicon chip using MEMS. A signal processor is coupled to the an FM vibratory gyroscope and to the FM resonant accelerometer for receiving the FM gyroscopic output signals and the FM accelerometer output signals. The signal processor generates simultaneous and decoupled measurement of input acceleration, input rotation rate, and temperature and/or temperature distribution within the IMU, self-calibration of the biases and scale factors of the IMU and its support electronics against temperature variations and other common mode errors, and reduction of the cross axis sensitivity by reducing acceleration errors in the gyroscope and rotation errors in the accelerometer.

摘要翻译： 在真空密封的单一封装装置中制造多轴微机电系统（MEMS）惯性测量单元（IMU）。 用于产生FM输出信号的FM振动陀螺仪和FM谐振加速度计使用MEMS制造在硅芯片中。 信号处理器耦合到FM振动陀螺仪和FM谐振加速度计，用于接收FM陀螺仪输出信号和FM加速度计输出信号。 信号处理器产生输入加速度，输入旋转速率以及IMU内的温度和/或温度分布的同时和去耦测量，对IMU及其支持电子器件的温度变化和其他共模的偏差和比例因子进行自校准 误差，减少陀螺仪中的加速度误差和加速度计中的旋转误差来降低交叉轴灵敏度。

公开(公告)号：US10247554B2

公开(公告)日：2019-04-02

申请号：US14863172

申请日：2015-09-23

申请人： The Regents of the University of California

发明人： Doruk Senkal ,  Sergei A. Zotov ,  Andrei M. Shkel

IPC分类号： G01C19/5747 ,  G01C19/5726

摘要： The improvement includes an outer proof mass having a corresponding center of mass; and an inner proof mass having a corresponding center of mass, where the corresponding centers of mass of the outer proof mass and the inner proof mass are approximately co-located. Thus, a double Foucault pendulum is essentially provided in a micromachined gyroscope.

公开(公告)号：US09296133B2

公开(公告)日：2016-03-29

申请号：US13847624

申请日：2013-03-20

申请人： The Regents of the University of California

发明人： Andrei M. Shkel ,  Alexander A. Trusov ,  Igor P. Prikhodko ,  Sergei A. Zotov

IPC分类号： H01R31/00 ,  B29C44/02 ,  G01C19/5691

CPC分类号： G01C19/56 ,  B29C44/02 ,  B29C44/022 ,  G01C19/5691

摘要： A vibratory sensor is fabricated as a three-dimensional batch-micromachined shell adapted to vibrate and support elastic wave propagation and wave precession in the shell or membrane and at least one driving electrode and preferably a plurality of driving electrodes directly or indirectly coupled to the shell to excite and sustain the elastic waves in the shell. The pattern of elastic waves is determined by the configuration of the driving electrode(s). At least one sensing electrode and preferably a plurality of sensing electrodes are provided to detect the precession of the elastic wave pattern in the shell. The rotation of the shell induces precession of the elastic wave pattern in the shell which is usable to measure the rotation angle or rate of the vibratory sensor.

摘要翻译： 制造振动传感器作为三维批量微机械加工的壳体，其适于振动并支撑壳体或膜中的弹性波传播和波形进动，以及至少一个驱动电极，优选地多个驱动电极直接或间接耦合到壳体 激发和维持壳中的弹性波。 弹性波的图案由驱动电极的结构决定。 提供至少一个感测电极和优选地多个感测电极以检测壳体中的弹性波形图案的进动。 壳体的旋转引起壳体中的弹性波纹的进动，其可用于测量振动传感器的旋转角度或速率。

公开(公告)号：US20140208823A1

公开(公告)日：2014-07-31

申请号：US13752044

申请日：2013-01-28

申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

发明人： Alexander A. Trusov ,  Sergei A. Zotov ,  Andrei M. Shkel

IPC分类号： G01P21/00

CPC分类号： G01P21/00 ,  G01C19/5783 ,  G01P15/097 ,  G01P15/125 ,  G01P15/18

摘要： A multi-axis microelectromechanical-systems (MEMS) inertial measurement unit (IMU) is fabricated in a vacuum sealed single packaged device. An FM vibratory gyroscope and an FM resonant accelerometer both for generating FM output signals is fabricated in the silicon chip using MEMS. A signal processor is coupled to the an FM vibratory gyroscope and to the FM resonant accelerometer for receiving the FM gyroscopic output signals and the FM accelerometer output signals. The signal processor generates simultaneous and decoupled measurement of input acceleration, in put rotation rate, and temperature and/or temperature distribution within the IMU, self-calibration of the biases and scale factors of the IMU and its support electronics against temperature variations and other common mode errors, and reduction of the cross axis sensitivity by reducing acceleration errors in the gyroscope and rotation errors in the accelerometer.

摘要翻译： 在真空密封的单一封装装置中制造多轴微机电系统（MEMS）惯性测量单元（IMU）。 用于产生FM输出信号的FM振动陀螺仪和FM谐振加速度计使用MEMS制造在硅芯片中。 信号处理器耦合到FM振动陀螺仪和FM谐振加速度计，用于接收FM陀螺仪输出信号和FM加速度计输出信号。 信号处理器产生输入加速度，置位旋转速率以及IMU内的温度和/或温度分布的同时和去耦测量，IMU及其支持电子器件的温度变化和其他常见的偏置和比例因子的自校准 模式误差，减少陀螺仪中的加速度误差和加速度计中的旋转误差来降低交叉轴灵敏度。