专利检索 ap:("Thibault Simon Mathieu LAURENT" OR "Gerardus Adrianus Antonius Maria KUSTERS" OR "Johan Gertrudis Cornelis KUNNEN" OR "Sander Catharina Reinier DERKS") AND inv:"Sander Catharina Reinier DERKS" 第 1 页

1.

发明申请
TEMPERATURE SENSING PROBE, BURL PLATE, LITHOGRAPHIC APPARATUS AND METHOD 有权
标题翻译：温度感测探头，平板，平面设备和方法

公开(公告)号：US20120307216A1

公开(公告)日：2012-12-06

申请号：US13488111

申请日：2012-06-04

申请人： Thibault Simon Mathieu LAURENT , Gerardus Adrianus Antonius Maria KUSTERS , Johan Gertrudis Cornelis KUNNEN , Sander Catharina Reinier DERKS

发明人： Thibault Simon Mathieu LAURENT , Gerardus Adrianus Antonius Maria KUSTERS , Johan Gertrudis Cornelis KUNNEN , Sander Catharina Reinier DERKS

IPC分类号： G03B27/52 , G01N25/18

CPC分类号： G03F7/70875 , G01K13/00 , G03F7/707

摘要： A temperature sensing probe including a temperature sensor in an elongate housing wherein the elongate housing of the probe is elongate in a first direction and the elongate housing is comprised of a material which has a thermal conductivity of at least 500 W/mK at 20° C. in at least one direction.

摘要翻译： 一种温度感测探头，其包括在细长壳体中的温度传感器，其中探针的细长壳体在第一方向上是细长的，并且细长壳体由在20℃具有至少500W / mK的热导率的材料构成在至少一个方向。