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公开(公告)号:US20170179044A1
公开(公告)日:2017-06-22
申请号:US15008432
申请日:2016-01-27
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Yung-Tai Hsu , Tien-Shang Kuo , Yen-Chuan Chen , Chih-Hao Cheng
IPC: H01L23/00 , H01L23/58 , H01L23/544
CPC classification number: H01L23/562 , H01L21/78 , H01L21/784 , H01L22/32 , H01L23/544 , H01L23/585 , H01L24/16 , H01L24/24 , H01L24/81 , H01L24/82 , H01L24/92 , H01L2223/5446 , H01L2224/0401 , H01L2224/04042 , H01L2224/05096 , H01L2224/05567 , H01L2224/131 , H01L2224/16145 , H01L2224/16147 , H01L2224/16227 , H01L2224/24051 , H01L2224/24105 , H01L2224/24146 , H01L2224/82047 , H01L2224/821 , H01L2224/92124 , H01L2224/94 , H01L2224/97 , H01L2924/10253 , H01L2924/10271 , H01L2924/14 , H01L2924/3512 , H01L2224/03 , H01L2924/014 , H01L2924/00014 , H01L2224/81 , H01L2224/82
Abstract: An integrated circuit includes a scribe line, a bonding pad structure and an extension pad structure. The scribe line is disposed on a substrate, and the bonding pad structure and the extension pad structure are both disposed in a dielectric layer on the substrate. The bonding pad structure includes first vias disposed on first metal layers in the dielectric layer. The extension pad structure includes second metal layers and a number of the second metal layer is less than that of the first metal layers. Also, the bonding pad structure has a first region and a second region, and second vias is disposed on the second metal layers in the first region and no vias is disposed on the second metal layers in the second region.
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公开(公告)号:US09941220B2
公开(公告)日:2018-04-10
申请号:US15008432
申请日:2016-01-27
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Yung-Tai Hsu , Tien-Shang Kuo , Yen-Chuan Chen , Chih-Hao Cheng
IPC: H01L23/00 , H01L23/544 , H01L23/58 , H01L21/784 , H01L21/66
CPC classification number: H01L23/562 , H01L21/78 , H01L21/784 , H01L22/32 , H01L23/544 , H01L23/585 , H01L24/16 , H01L24/24 , H01L24/81 , H01L24/82 , H01L24/92 , H01L2223/5446 , H01L2224/0401 , H01L2224/04042 , H01L2224/05096 , H01L2224/05567 , H01L2224/131 , H01L2224/16145 , H01L2224/16147 , H01L2224/16227 , H01L2224/24051 , H01L2224/24105 , H01L2224/24146 , H01L2224/82047 , H01L2224/821 , H01L2224/92124 , H01L2224/94 , H01L2224/97 , H01L2924/10253 , H01L2924/10271 , H01L2924/14 , H01L2924/3512 , H01L2224/03 , H01L2924/014 , H01L2924/00014 , H01L2224/81 , H01L2224/82
Abstract: An integrated circuit includes a scribe line, a bonding pad structure and an extension pad structure. The scribe line is disposed on a substrate, and the bonding pad structure and the extension pad structure are both disposed in a dielectric layer on the substrate. The bonding pad structure includes first vias disposed on first metal layers in the dielectric layer. The extension pad structure includes second metal layers and a number of the second metal layer is less than that of the first metal layers. Also, the bonding pad structure has a first region and a second region, and second vias is disposed on the second metal layers in the first region and no vias is disposed on the second metal layers in the second region.
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