公开(公告)号：US20190087481A1

公开(公告)日：2019-03-21

申请号：US15820662

申请日：2017-11-22

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Li-Chin Wang ,  Ya-Ching Cheng ,  Chien-Hung Chen ,  Chun-Liang Hou ,  Da-Ching Liao

IPC: G06F17/30 ,  G05B19/418

CPC classification number: G06F16/285 ,  G05B19/4183 ,  G05B2219/31318

Abstract: A manufacture parameters grouping and analyzing method, and a manufacture parameters grouping and analyzing system are provided. The manufacture parameters grouping and analyzing method includes the following steps: A plurality of process factors are classified into a plurality of groups. In each of the groups, an intervening relationship between any two of the process factors is larger than a predetermined correlation value. In each of the groups, at least one representative factor is selected from each of the groups according to a plurality of outputting relationships of the process factors related to an output factor or a plurality of sample amounts of the process factors. Finally, the representative factor is used for various applications.

公开(公告)号：US11074376B2

公开(公告)日：2021-07-27

申请号：US15497489

申请日：2017-04-26

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Ya-Ching Cheng ,  Chun-Liang Hou ,  Chien-Hung Chen ,  Wen-Jung Liao ,  Min-Chin Hsieh ,  Da-Ching Liao ,  Li-Chin Wang

IPC: G06F30/20

Abstract: A method for analyzing a process output and a method for creating an equipment parameter model are provided. The method for analyzing the process output includes the following steps: A plurality of process steps are obtained. A processor obtains a step model set including a plurality of first step regression models, each of which represents a relationship between N of the process steps and a process output. The processor calculates a correlation of each of the first step regression models. The processor picks up at least two of the first step regression models to be a plurality of second step regression models whose correlations are ranked at top among the correlations of the first step regression models. The processor updates the step model set by a plurality of third step regression models, each of which represents a relationship between M of the process steps and the process output.

公开(公告)号：US20190266214A1

公开(公告)日：2019-08-29

申请号：US15905263

申请日：2018-02-26

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Da-Ching LIAO ,  Li-Chin Wang ,  Ya-Ching Cheng ,  Chien-Hung Chen ,  Chun-Liang Hou

IPC: G06F17/15

Abstract: An analyzing method and an analyzing system for manufacturing data are provided. The analyzing method includes the following steps. A plurality of models each of which has a correlation value representing a relationship between at least one of a plurality of factors and a target parameter are provided. The models are screened according to the correlation values. A rank information and a frequency information of the factors are listed up according to the models. The factors are screened according to the rank information and the frequency information. The models are ranked and at least one of the models is selected.

公开(公告)号：US10776402B2

公开(公告)日：2020-09-15

申请号：US15820662

申请日：2017-11-22

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Li-Chin Wang ,  Ya-Ching Cheng ,  Chien-Hung Chen ,  Chun-Liang Hou ,  Da-Ching Liao

IPC: G06F17/00 ,  G06F16/28 ,  G05B19/418

Abstract: A manufacture parameters grouping and analyzing method, and a manufacture parameters grouping and analyzing system are provided. The manufacture parameters grouping and analyzing method includes the following steps: A plurality of process factors are classified into a plurality of groups. In each of the groups, an intervening relationship between any two of the process factors is larger than a predetermined correlation value. In each of the groups, at least one representative factor is selected from each of the groups according to a plurality of outputting relationships of the process factors related to an output factor or a plurality of sample amounts of the process factors. Finally, the representative factor is used for various applications.

公开(公告)号：US10482153B2

公开(公告)日：2019-11-19

申请号：US15905263

申请日：2018-02-26

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Da-Ching Liao ,  Li-Chin Wang ,  Ya-Ching Cheng ,  Chien-Hung Chen ,  Chun-Liang Hou

IPC: G06F7/06 ,  G06F17/50 ,  G06F17/15

Abstract: An analyzing method and an analyzing system for manufacturing data are provided. The analyzing method includes the following steps. A plurality of models each of which has a correlation value representing a relationship between at least one of a plurality of factors and a target parameter are provided. The models are screened according to the correlation values. A rank information and a frequency information of the factors are listed up according to the models. The factors are screened according to the rank information and the frequency information. The models are ranked and at least one of the models is selected.

公开(公告)号：US20180314773A1

公开(公告)日：2018-11-01

申请号：US15497489

申请日：2017-04-26

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Ya-Ching Cheng ,  Chun-Liang Hou ,  Chien-Hung Chen ,  Wen-Jung Liao ,  Min-Chin Hsieh ,  Da-Ching Liao ,  Li-Chin Wang

IPC: G06F17/50

Abstract: A method for analyzing a process output and a method for creating an equipment parameter model are provided. The method for analyzing the process output includes the following steps: A plurality of process steps are obtained. A processor obtains a step model set including a plurality of first step regression models, each of which represents a relationship between N of the process steps and a process output. The processor calculates a correlation of each of the first step regression models. The processor picks up at least two of the first step regression models to be a plurality of second step regression models whose correlations are ranked at top among the correlations of the first step regression models. The processor updates the step model set by a plurality of third step regression models, each of which represents a relationship between M of the process steps and the process output.