SUBSTRATE PROCESSING SYSTEM
    2.
    发明公开

    公开(公告)号:US20240355654A1

    公开(公告)日:2024-10-24

    申请号:US18758976

    申请日:2024-06-28

    IPC分类号: H01L21/67 G05B19/418

    摘要: A substrate processing system comprising, a frame forming a substrate transport space within the substrate processing system, a substrate transport apparatus operably coupled to the frame with a movable arm and a drive section configured to move the movable arm and transport a substrate, held on an end effector of the arm, through the transport space from a first position of the substrate processing system to a second position of the substrate processing system different than the first position; and a controller operably coupled to the movable arm and drive section so as to effect movement of the movable arm to the different system positions, the controller is communicably coupled to at least one arm motion sensor and at least one system metrology sensor, and the at least one system metrology sensor senses system metrology predetermined characteristics, different that the arm motion predetermined characteristics.

    INFORMATION PROCESSING APPARATUS, NON-TRANSITORY COMPUTER-READABLE MEDIUM, AND INFORMATION PROCESSING METHOD

    公开(公告)号:US20240338013A1

    公开(公告)日:2024-10-10

    申请号:US18292925

    申请日:2021-08-04

    IPC分类号: G05B19/418

    CPC分类号: G05B19/41865 G05B19/4183

    摘要: A device control apparatus includes a device-information acquiring unit that acquires, from one or more devices, device information indicating at least manipulations performed by a user; a device-information analyzing unit that analyzes the device information to specify a manipulation pattern being a pattern in which the one or more devices are manipulated in a chronological sequence; a user-information acquiring unit that acquires user information indicating a state of the user; and a manipulation-order determining unit that determines an adopted manipulation order as a manipulation order from the manipulation pattern in such a manner that load on the user changes depending on the state of the user, the manipulation order being an order of manipulations to be performed in a chronological sequence on the one or more devices.

    SYSTEM AND METHOD FOR AN INSTRUMENTATION NODE FOR MEASURING AND TRACKING CARBON FOOTPRINT OF MANUFACTURED GOODS

    公开(公告)号:US20240303668A1

    公开(公告)日:2024-09-12

    申请号:US18180501

    申请日:2023-03-08

    IPC分类号: G06Q30/018 G05B19/418

    CPC分类号: G06Q30/018 G05B19/4183

    摘要: According to at least one exemplary embodiment a system for measuring and tracking carbon footprint of manufactured goods may be provided. One or more sensors may take data readings from a manufacturing process and a digital signal processor may receive the data readings from the one or more sensors and process the data readings at a digital signal processor clock rate. The data readings may be stored in a first memory storage. A processor may determine an energy consumption of the manufacturing process based on the processed data readings at a processor clock rate and the energy consumption data may be stored in a second memory storage that stores the energy consumption data determined by the micro computing unit.

    Safeguarding resources of physical entities in a shared environment

    公开(公告)号:US12078984B2

    公开(公告)日:2024-09-03

    申请号:US17273129

    申请日:2020-02-11

    申请人: Robert Bosch GmbH

    IPC分类号: G05B19/418 G06N3/08

    摘要: A control system and a control method for controlling physical entities to complete tasks within a shared environment. Use is made of a trained resource safety model to predict whether future resource levels of the physical entities satisfy a safe resource level condition, such as a minimum resource level, given previous resource levels and a selection of behaviours for the physical entities. If a respective physical entity is predicted to have a future resource level which does not satisfy the safe resource level condition, the selected behaviour may be modified or replaced, for example by a behaviour which is predicted by the resource safety model to satisfy the safe resource level condition.