公开(公告)号：US10928570B2

公开(公告)日：2021-02-23

申请号：US16266913

申请日：2019-02-04

Applicant: VIAVI Solutions Inc.

Inventor： Georg J. Ockenfuss ,  Tim Gustafson ,  Jeffrey James Kuna ,  Markus Bilger ,  Richard A. Bradley, Jr.

IPC: G02B5/28 ,  H01L27/146 ,  G02B1/10

Abstract: An optical filter, a sensor device including the optical filter, and a method of fabricating the optical filter are provided. The optical filter includes one or more dielectric layers and one or more metal layers stacked in alternation. The metal layers are intrinsically protected by the dielectric layers. In particular, the metal layers have tapered edges that are protectively covered by one or more of the dielectric layers.

公开(公告)号：US20190170921A1

公开(公告)日：2019-06-06

申请号：US16266913

申请日：2019-02-04

Applicant: VIAVI Solutions Inc.

Inventor： Georg J. Ockenfuss ,  Tim Gustafson ,  Jeffrey James Kuna ,  Markus Bilger ,  Richard A. Bradley, JR.

IPC: G02B5/28 ,  G02B1/10 ,  H01L27/146

Abstract: An optical filter, a sensor device including the optical filter, and a method of fabricating the optical filter are provided. The optical filter includes one or more dielectric layers and one or more metal layers stacked in alternation. The metal layers are intrinsically protected by the dielectric layers. In particular, the metal layers have tapered edges that are protectively covered by one or more of the dielectric layers.

公开(公告)号：US12078829B2

公开(公告)日：2024-09-03

申请号：US18349404

申请日：2023-07-10

Applicant: VIAVI Solutions Inc.

Inventor： Georg J. Ockenfuss ,  Tim Gustafson ,  Jeffrey James Kuna ,  Markus Bilger ,  Richard A. Bradley, Jr.

IPC: G02B5/28 ,  G02B1/10 ,  H01L27/146

CPC classification number: G02B5/285 ,  G02B1/10 ,  G02B5/281 ,  G02B5/283 ,  H01L27/14621 ,  H01L27/14685

Abstract: An optical filter, a sensor device including the optical filter, and a method of fabricating the optical filter are provided. The optical filter includes one or more dielectric layers and one or more metal layers stacked in alternation. The metal layers are intrinsically protected by the dielectric layers. In particular, the metal layers have tapered edges that are protectively covered by one or more of the dielectric layers.

公开(公告)号：US11782199B2

公开(公告)日：2023-10-10

申请号：US17248285

申请日：2021-01-19

Applicant: VIAVI Solutions Inc.

Inventor： Georg J. Ockenfuss ,  Tim Gustafson ,  Jeffrey James Kuna ,  Markus Bilger ,  Richard A. Bradley, Jr.

IPC: G02B5/28 ,  H01L27/146 ,  G02B1/10

CPC classification number: G02B5/285 ,  G02B1/10 ,  G02B5/281 ,  G02B5/283 ,  H01L27/14621 ,  H01L27/14685

Abstract: An optical filter, a sensor device including the optical filter, and a method of fabricating the optical filter are provided. The optical filter includes one or more dielectric layers and one or more metal layers stacked in alternation. The metal layers are intrinsically protected by the dielectric layers. In particular, the metal layers have tapered edges that are protectively covered by one or more of the dielectric layers.

公开(公告)号：US20170227695A9

公开(公告)日：2017-08-10

申请号：US14308343

申请日：2014-06-18

Applicant: Viavi Solutions Inc.

Inventor： Georg J. Ockenfuss ,  Tim Gustafson ,  Jeffrey James Kuna ,  Markus Bilger ,  Richard A. Bradley

IPC: G02B5/28 ,  G02B1/10 ,  H01L27/146

CPC classification number: G02B5/285 ,  G02B1/10 ,  G02B5/281 ,  G02B5/283 ,  H01L27/14621 ,  H01L27/14685

Abstract: An optical filter, a sensor device including the optical filter, and a method of fabricating the optical filter are provided. The optical filter includes one or more dielectric layers and one or more metal layers stacked in alternation. The metal layers are intrinsically protected by the dielectric layers. In particular, the metal layers have tapered edges that are protectively covered by one or more of the dielectric layers.

公开(公告)号：US11650361B2

公开(公告)日：2023-05-16

申请号：US16722325

申请日：2019-12-20

Applicant: VIAVI Solutions Inc.

Inventor： Scott Rowlands ,  Georg J. Ockenfuss ,  Tim Gustafson ,  Marius Grigonis

IPC: G02B5/20 ,  G02B1/115 ,  G02B1/00 ,  C23C14/34 ,  C23C28/00 ,  C23C14/08 ,  C23C14/06 ,  C23C14/10

CPC classification number: G02B5/208 ,  C23C14/0694 ,  C23C14/081 ,  C23C14/083 ,  C23C14/10 ,  C23C14/34 ,  C23C28/345 ,  G02B1/007 ,  G02B1/115 ,  G02B5/20

Abstract: An optical filter may include a set of optical filter layers disposed onto a substrate. The set of optical filter layers may include a first subset of optical filter layers comprising a first material with a first refractive index. The first material may comprise at least silicon and hydrogen. The set of optical filter layers may include a second subset of optical filter layers comprising a second material with a second refractive index. The second material is different from the first material and the second refractive index is less than the first refractive index. The set of optical filter layers may include a third subset of optical filter layers comprising a third material different from the first material and the second material.

公开(公告)号：US11215741B2

公开(公告)日：2022-01-04

申请号：US16164225

申请日：2018-10-18

Applicant: VIAVI Solutions Inc.

Inventor： Richard A. Bradley, Jr. ,  Tim Gustafson

IPC: G02B5/20 ,  G01J1/04 ,  G02B5/28

Abstract: A filter may include a first component filter associated with a first angle shift and a first passband. The filter may include a second component filter associated with a second angle shift and a second passband, wherein the first angle shift, the first passband, the second angle shift, and the second passband are configured to make the filter transmissive to a spectral range of light at a first angle of incidence and reflective to the spectral range of light at a second angle of incidence.

公开(公告)号：US20190219748A1

公开(公告)日：2019-07-18

申请号：US16164225

申请日：2018-10-18

Applicant: VIAVI Solutions Inc.

Inventor： Richard A. BRADLEY, JR. ,  Tim Gustafson

IPC: G02B5/20 ,  G01J1/04

CPC classification number: G02B5/208 ,  G01J1/0488 ,  G01J1/06 ,  G02B5/281 ,  G02B5/285

Abstract: A filter may include a first component filter associated with a first angle shift and a first passband. The filter may include a second component filter associated with a second angle shift and a second passband, wherein the first angle shift, the first passband, the second angle shift, and the second passband are configured to make the filter transmissive to a spectral range of light at a first angle of incidence and reflective to the spectral range of light at a second angle of incidence.

公开(公告)号：US10197716B2

公开(公告)日：2019-02-05

申请号：US14308343

申请日：2014-06-18

Applicant: Viavi Solutions Inc.

Inventor： Georg J. Ockenfuss ,  Tim Gustafson ,  Jeffrey James Kuna ,  Markus Bilger ,  Richard A Bradley

IPC: G02B5/28 ,  H01L27/146 ,  G02B1/10

Abstract: An optical filter, a sensor device including the optical filter, and a method of fabricating the optical filter are provided. The optical filter includes one or more dielectric layers and one or more metal layers stacked in alternation. The metal layers are intrinsically protected by the dielectric layers. In particular, the metal layers have tapered edges that are protectively covered by one or more of the dielectric layers.