OPTICAL ASSEMBLY
    7.
    发明公开
    OPTICAL ASSEMBLY 审中-公开

    公开(公告)号:US20240103267A1

    公开(公告)日:2024-03-28

    申请号:US18463075

    申请日:2023-09-07

    CPC classification number: G02B27/0025 G02B5/28

    Abstract: An optical assembly includes a housing, and an optical filter and an optical compensator disposed within the housing. The optical filter is oriented at a first non-zero angle in a first tilt direction with respect to an optical axis of the optical assembly. The optical compensator is oriented at a second non-zero angle in a second tilt direction with respect to the normal of the optical axis of the optical assembly. The optical filter is configured to pass, to the optical compensator, a portion of an optical beam that impinges on the optical filter along an optical axis of the optical assembly, such that the portion of the optical beam is offset from the optical axis. The optical compensator is configured to cause the portion of the optical beam to propagate out of the optical assembly along the optical axis of the optical assembly (or with a minimized offset).

    LIGHT PIPE FOR SPECTROSCOPY
    8.
    发明申请

    公开(公告)号:US20220412880A1

    公开(公告)日:2022-12-29

    申请号:US17929113

    申请日:2022-09-01

    Abstract: A spectroscopic assembly may include a spectrometer. The spectrometer may include an illumination source to generate a light to illuminate a sample. The spectrometer may include a sensor to obtain a spectroscopic measurement based on light, reflected by the sample, from the light illuminating the sample. The spectroscopic assembly may include a light pipe to transfer the light reflected from the sample. The light pipe may include a first opening to receive the spectrometer. The light pipe may include a second opening to receive the sample, such that the sample is enclosed by the light pipe and a base surface when the sample is received at the second opening. The light pipe may be associated with aligning the illumination source and the sensor with the sample.

    OPTICAL MONITOR
    9.
    发明申请

    公开(公告)号:US20210002756A1

    公开(公告)日:2021-01-07

    申请号:US16459433

    申请日:2019-07-01

    Abstract: A coating system may include a coating chamber; a substrate holder to move a substrate along a motion path; and a sensor device in the coating chamber, wherein the sensor device is configured to move along the motion path, and wherein the sensor device is to perform a spectral measurement on the substrate.

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